Silicon carbide electrical insulator material of low dielectric constant
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United States of America Patent
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Oct 1, 1985
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N/A
app pub date -
Apr 29, 1982
filing date -
Apr 30, 1981
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Expired
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Abstract
A silicon carbide electrical insulator material of low dielectric constant comprising an electrically insulating sintered body containing silicon carbide as a main constituent and an element providing electrical insulating properties in sintered state, wherein the sintered body comprises an element selected from V family in the periodic table and the carrier concentration within the crystal grain of silicon carbide is 5.times.10.sup.17 cm.sup.-3 or less.
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