Materials and methods for pressure and temperature sensors at cryogenic temperatures
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United States of America Patent
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Oct 8, 1985
Grant Date -
N/A
app pub date -
Jun 1, 1984
filing date -
Jun 1, 1984
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Capacitive pressure and temperature sensing devices for use at cryogenic temperatures are provided utilizing a quantum ferroelectric pyrochlore ceramic material as the dielectric. The ceramic material has the formula: (Cd.sub.1-x M.sub.x).sub.2 (Nb.sub.1-y M'.sub.y).sub.2 O.sub.7 where M is Pb, Ca, Sr, Ba, or mixtures thereof; where M' is Ta, Sb, or mixtures thereof; and where x and y are numbers in the range of from 0 to 1. M and M' are chosen such that the pressure sensing device uses a ceramic with a nearly temperature independent dielectric constant while the temperature sensing device uses a ceramic with a strongly temperature dependent dielectric constant. The sensors may comprise multi-layered capacitive devices, and may be combined into a single temperature and pressure sensing device.
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