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Abstract

A silicon accelerometer employing the piezoresistive effect of single crystal silicon to measure the flexure of semiconductor beams supporting a semiconductor mass. In one embodiment a rectangular semiconductor center mass is supported at each corner by a semiconductor beam parallel to one side of the center mass and perpendicular to the adjacent beams, each of the beams having an implanted resistor at the stationary end thereof. The crystal planes and relative orientations of the resistors are selected so that two resistors always increase, and two always decrease their resistance by the same amount as the center mass is displaced, which allows them to be connected in a Wheatstone bridge having a symmetric differential output.

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First Claim