Method of manufacturing a wiring system
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United States of America Patent
Stats
-
Dec 31, 1985
Issued Date -
N/A
app pub date -
Jun 7, 1983
filing date -
Nov 14, 1978
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A self-registering method of manufacturing an air-(vacuum) -insulated crossing multilayer wiring system of large density is disclosed. Between the lowermost and uppermost wiring layers an intermediate layer is provided in which recesses are formed between the intermediate layer and the lowermost wiring layer. By means of said recesses the intermediate layer can be removed entirely at the area of the crossings during the etching process, while elsewhere portions of the intermediate layer remain as supporting parts or as connecting members.
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Cited Art Landscape
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