Importance

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Abstract

A capacitive pressure transducer is comprised of a deflectable diaphragm and a substantially planar reference plate, both preferably molded of ceramic. The diaphragm includes a sensor electrode ring disposed about a central region thereof and a concentric reference electrode ring substantially encompassing the sensor electrode, with a guard ring between the electrodes to electrically isolate the reference electrode from the sensor electrode. The reference plate is disposed in facing relation to the deformable flat surface of the diaphragm and includes a sensor electrode ring disposed and in opposition to the sensor electrode on the diaphragm to form a sensing capacitor therewith. Spacer means disposed in the central region between the diaphragm and the reference plate intercouple the two elements and maintain a substantially fixed dimension in the central region therebetween while permitting deformation of the diaphragm in response to pressure variations. The spacer means is conductive and facilitates electrical connection to the sensor electrode on the reference plate. A cover is disposed about the reference plate and coupled to the periphery of the diaphragm, and includes a reference electrode ring in facing relation to the reference electrode on the diaphragm to form a reference capacitor therewith.

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First Claim