Method for the manufacture of a display screen based on thin-film transistors and capacitors
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United States of America Patent
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Jan 14, 1986
Issued Date -
N/A
app pub date -
May 7, 1984
filing date -
Sep 14, 1982
priority date (Note) -
Expired
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Abstract
Method for the manufacture of electronic circuits based on thin-film transistors and capacitors. According to the invention this method comprises the following operations: deposition of a layer (102) of a first transparent, conductive material on an insulating substrate (100), first photogravure applied to the first layer to constitute blocks (106) forming one of the plates of the future capacitors, as well as the sources and drains for the future transistors, deposition of a hydrogenated, amorphous silicon layer (110), deposition of an insulating layer (112), deposition of a layer (114) of a second conductive material and second photogravure applied to the silicon layer-insulating layer-conductive layer assembly in order to define the control grids of the transistors. Application to the construction of display screen control circuits or BBD registers.
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