US Patent No: 4,566,935

Number of patents in Portfolio can not be more than 2000

Spatial light modulator and method

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Abstract

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Methods of fabrication of spatial light modulators with deflectable beams by plasma etching after dicing of a substrate into chips, each of the chips an SLM, is disclosed. Also, various architectures available with such plasma etching process are disclosed and include metal cloverleafs for substrate addressing, metal flaps formed in a reflecting layer over a photoresist spacer layer, and torsion hinged flaps in a reflecting layer.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX18205

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hornbeck, Larry J Van Alstyne, TX 37 11685

Cited Art Landscape

Patent Info (Count) # Cites Year
 
Honeywell Inc. (1)
4,472,239 Method of making semiconductor device 86 1983
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
4,457,820 Two step plasma etching 22 1981

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (240)
7,123,216 Photonic MEMS and structures 550 1999
7,138,984 Directly laminated touch sensitive screen 107 2001
7,042,643 Interferometric modulation of radiation 183 2002
7,110,158 Photonic MEMS and structures 178 2002
7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 30 2002
7,297,471 Method for manufacturing an array of interferometric modulators 19 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 105 2003
7,460,291 Separable modulator 53 2003
7,012,726 MEMS devices with unreleased thin film components 75 2003
7,198,973 Method for fabricating an interference display unit 102 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 149 2003
7,692,844 Interferometric modulation of radiation 22 2004
7,532,194 Driver voltage adjuster 4 2004
7,119,945 Altering temporal response of microelectromechanical elements 136 2004
7,706,050 Integrated modulator illumination 32 2004
7,193,768 Interference display cell 24 2004
7,476,327 Method of manufacture for microelectromechanical devices 38 2004
7,060,895 Modifying the electro-mechanical behavior of devices 48 2004
7,280,265 Interferometric modulation of radiation 45 2004
7,164,520 Packaging for an interferometric modulator 37 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 50 2004
7,855,824 Method and system for color optimization in a display 20 2005
7,893,919 Display region architectures 8 2005
7,813,026 System and method of reducing color shift in a display 16 2005
7,551,159 System and method of sensing actuation and release voltages of an interferometric modulator 17 2005
7,424,198 Method and device for packaging a substrate 3 2005
7,142,346 System and method for addressing a MEMS display 32 2005
7,515,147 Staggered column drive circuit systems and methods 13 2005
7,379,227 Method and device for modulating light 12 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 40 2005
7,289,259 Conductive bus structure for interferometric modulator array 66 2005
7,460,246 Method and system for sensing light using interferometric elements 12 2005
7,560,299 Systems and methods of actuating MEMS display elements 18 2005
7,012,732 Method and device for modulating light with a time-varying signal 62 2005
7,359,066 Electro-optical measurement of hysteresis in interferometric modulators 8 2005
7,701,631 Device having patterned spacers for backplates and method of making the same 4 2005
7,259,449 Method and system for sealing a substrate 16 2005
7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device 4 2005
7,668,415 Method and device for providing electronic circuitry on a backplate 6 2005
7,429,334 Methods of fabricating interferometric modulators by selectively removing a material 14 2005
7,420,728 Methods of fabricating interferometric modulators by selectively removing a material 17 2005
7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 8 2005
7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 8 2005
7,299,681 Method and system for detecting leak in electronic devices 2 2005
7,920,135 Method and system for driving a bi-stable display 4 2005
7,679,627 Controller and driver features for bi-stable display 3 2005
7,586,484 Controller and driver features for bi-stable display 17 2005
7,535,466 System with server based control of client device display features 8 2005
7,532,195 Method and system for reducing power consumption in a display 7 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 47 2005
7,289,256 Electrical characterization of interferometric modulators 13 2005
7,602,375 Method and system for writing data to MEMS display elements 3 2005
7,916,103 System and method for display device with end-of-life phenomena 2 2005
7,321,456 Method and device for corner interferometric modulation 42 2005
7,626,581 Device and method for display memory using manipulation of mechanical response 3 2005
7,372,613 Method and device for multistate interferometric light modulation 73 2005
7,889,163 Drive method for MEMS devices 18 2005
7,692,839 System and method of providing MEMS device with anti-stiction coating 1 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 41 2005
7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge 4 2005
7,843,410 Method and device for electrically programmable display 6 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 38 2005
7,547,565 Method of manufacturing optical interference color display 13 2005
7,527,995 Method of making prestructure for MEMS systems 30 2005
7,808,703 System and method for implementation of interferometric modulator displays 4 2005
7,349,136 Method and device for a display having transparent components integrated therein 8 2005
RE42119 Microelectrochemical systems device and method for fabricating same 7 2005
8,008,736 Analog interferometric modulator device 4 2005
7,710,629 System and method for display device with reinforcing substance 4 2005
8,124,434 Method and system for packaging a display 1 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 26 2005
7,471,444 Interferometric modulation of radiation 14 2005
7,388,706 Photonic MEMS and structures 14 2005
7,345,805 Interferometric modulator array with integrated MEMS electrical switches 6 2005
7,196,837 Area array modulation and lead reduction in interferometric modulators 26 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 64 2005
8,004,504 Reduced capacitance display element 6 2005
7,553,684 Method of fabricating interferometric devices using lift-off processing techniques 6 2005
7,417,783 Mirror and mirror layer for optical modulator and method 9 2005
7,373,026 MEMS device fabricated on a pre-patterned substrate 15 2005
7,343,080 System and method of testing humidity in a sealed MEMS device 8 2005
RE40436 Hermetic seal and method to create the same 8 2005
7,304,784 Reflective display device having viewable display on both sides 45 2005
7,161,730 System and method for providing thermal compensation for an interferometric modulator display 83 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 32 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 5 2005
7,463,421 Method and device for modulating light 18 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 2 2005
7,310,179 Method and device for selective adjustment of hysteresis window 8 2005
7,724,993 MEMS switches with deforming membranes 2 2005
7,492,502 Method of fabricating a free-standing microstructure 12 2005
7,417,735 Systems and methods for measuring color and contrast in specular reflective devices 34 2005
7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 17 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 18 2005
7,136,213 Interferometric modulators having charge persistence 16 2005
7,564,612 Photonic MEMS and structures 70 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 197 2005
7,369,294 Ornamental display device 45 2005
7,710,636 Systems and methods using interferometric optical modulators and diffusers 23 2005
7,684,104 MEMS using filler material and method 11 2005
7,653,371 Selectable capacitance circuit 18 2005
7,415,186 Methods for visually inspecting interferometric modulators for defects 5 2005
7,675,669 Method and system for driving interferometric modulators 4 2005
7,453,579 Measurement of the dynamic characteristics of interferometric modulators 11 2005
7,545,550 Systems and methods of actuating MEMS display elements 4 2005
8,310,441 Method and system for writing data to MEMS display elements 1 2005
7,446,927 MEMS switch with set and latch electrodes 6 2005
7,486,429 Method and device for multistate interferometric light modulation 11 2005
7,236,284 Photonic MEMS and structures 93 2005
7,630,114 Diffusion barrier layer for MEMS devices 3 2005
8,014,059 System and method for charge control in a MEMS device 0 2005
7,776,631 MEMS device and method of forming a MEMS device 16 2005
7,618,831 Method of monitoring the manufacture of interferometric modulators 0 2005
7,403,323 Process control monitors for interferometric modulators 1 2005
7,369,252 Process control monitors for interferometric modulators 0 2005
7,259,865 Process control monitors for interferometric modulators 20 2005
8,391,630 System and method for power reduction when decompressing video streams for interferometric modulator displays 1 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 4 2005
7,355,779 Method and system for driving MEMS display elements 3 2006
7,916,980 Interconnect structure for MEMS device 2 2006
7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 8 2006
8,194,056 Method and system for writing data to MEMS display elements 0 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 2 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 8 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 27 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 46 2006
7,483,197 Photonic MEMS and structures 18 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 13 2006
7,532,377 Movable micro-electromechanical device 37 2006
7,643,203 Interferometric optical display system with broadband characteristics 24 2006
7,948,457 Systems and methods of actuating MEMS display elements 1 2006
7,903,047 Mode indicator for interferometric modulator displays 3 2006
7,711,239 Microelectromechanical device and method utilizing nanoparticles 2 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 8 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 5 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 50 2006
8,049,713 Power consumption optimized display update 2 2006
7,920,136 System and method of driving a MEMS display device 1 2006
7,706,044 Optical interference display cell and method of making the same 9 2006
7,880,954 Integrated modulator illumination 17 2006
7,369,292 Electrode and interconnect materials for MEMS devices 16 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 19 2006
8,174,469 Dynamic driver IC and display panel configuration 0 2006
7,848,001 Method and system for interferometric modulation in projection or peripheral devices 7 2006
7,907,319 Method and device for modulating light with optical compensation 26 2006
7,161,094 Modifying the electro-mechanical behavior of devices 24 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 83 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 17 2006
7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports 6 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 73 2006
7,187,489 Photonic MEMS and structures 91 2006
7,636,151 System and method for providing residual stress test structures 0 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 7 2006
7,702,192 Systems and methods for driving MEMS display 0 2006
7,835,061 Support structures for free-standing electromechanical devices 10 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 50 2006
7,777,715 Passive circuits for de-multiplexing display inputs 3 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 13 2006
7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 4 2006
7,936,031 MEMS devices having support structures 5 2006
7,679,812 Support structure for MEMS device and methods therefor 25 2006
7,566,940 Electromechanical devices having overlying support structures 12 2006
7,534,640 Support structure for MEMS device and methods therefor 15 2006
7,830,586 Transparent thin films 17 2006
7,554,711 MEMS devices with stiction bumps 43 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 6 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 34 2006
7,747,109 MEMS device having support structures configured to minimize stress-related deformation and methods for fabricating same 4 2006
7,704,773 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 4 2006
7,486,867 Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge 4 2006
7,928,940 Drive method for MEMS devices 0 2006
7,301,704 Moveable micro-electromechanical device 12 2006
7,898,722 Microelectromechanical device with restoring electrode 35 2006
7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure 7 2006
7,619,810 Systems and methods of testing micro-electromechanical devices 2 2006
7,388,697 System and method for addressing a MEMS display 8 2006
7,242,512 System and method for addressing a MEMS display 9 2006
7,667,884 Interferometric modulators having charge persistence 3 2006
7,511,875 Moveable micro-electromechanical device 4 2006
8,284,474 Method and system for interferometric modulation in projection or peripheral devices 0 2007
7,872,792 Method and device for modulating light with multiple electrodes 11 2007
7,846,344 Method and device for modulating light 1 2007
7,733,552 MEMS cavity-coating layers and methods 5 2007
8,059,326 Display devices comprising of interferometric modulator and sensor 6 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
7,532,381 Method of making a light modulating display device and associated transistor circuitry and structures thereof 22 2007
7,569,488 Methods of making a MEMS device by monitoring a process parameter 32 2007
8,068,268 MEMS devices having improved uniformity and methods for making them 1 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 17 2007
7,723,015 Method for manufacturing an array of interferometeric modulators 12 2007
8,081,369 System and method for a MEMS device 2 2007
7,852,545 Method and device for modulating light 15 2007
7,848,004 System and method for a MEMS device 9 2007
7,839,556 Method and device for modulating light 1 2007
7,830,587 Method and device for modulating light with semiconductor substrate 16 2007
7,826,120 Method and device for multi-color interferometric modulation 15 2007
7,808,694 Method and device for modulating light 15 2007
7,800,809 System and method for a MEMS device 1 2007
7,738,157 System and method for a MEMS device 20 2007
8,072,402 Interferometric optical modulator with broadband reflection characteristics 8 2007
7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 5 2007
7,564,613 Microelectromechanical device and method utilizing a porous surface 7 2007
7,556,917 Method for manufacturing an array of interferometric modulators 13 2007
7,561,321 Process and structure for fabrication of MEMS device having isolated edge posts 26 2007
7,623,752 System and method of testing humidity in a sealed MEMS device 5 2008
7,570,865 System and method of testing humidity in a sealed MEMS device 1 2008
8,105,496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer 2 2008
8,040,588 System and method of illuminating interferometric modulators using backlighting 2 2008
8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 3 2008
8,115,988 System and method for micro-electromechanical operation of an interferometric modulator 0 2008
8,416,487 Photonic MEMS and structures 0 2009
8,169,687 Photonic MEMS and structures 0 2009
7,791,787 Moveable micro-electromechanical device 1 2009
7,830,588 Method of making a light modulating display device and associated transistor circuitry and structures thereof 23 2009
7,864,403 Post-release adjustment of interferometric modulator reflectivity 0 2009
8,735,225 Method and system for packaging MEMS devices with glass seal 0 2009
8,368,124 Electromechanical devices having etch barrier layers 0 2009
7,875,485 Methods of fabricating MEMS devices having overlying support structures 4 2009
8,422,108 Method and device for modulating light with optical compensation 0 2009
8,736,590 Low voltage driver scheme for interferometric modulators 0 2010
7,835,093 Methods for forming layers within a MEMS device using liftoff processes 6 2010
8,218,229 Support structure for MEMS device and methods therefor 0 2010
8,149,497 Support structure for MEMS device and methods therefor 1 2010
7,952,789 MEMS devices with multi-component sacrificial layers 5 2010
8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same 1 2010
8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 0 2010
8,164,815 MEMS cavity-coating layers and methods 0 2010
7,929,197 System and method for a MEMS device 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,278,726 Controlling electromechanical behavior of structures within a microelectromechanical systems device 0 2010
8,853,747 Method of making an electronic device with a curved backplate 0 2010
8,035,884 Method and device for modulating light with semiconductor substrate 4 2010
8,358,458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
8,817,357 Mechanical layer and methods of forming the same 0 2011
8,659,816 Mechanical layer and methods of making the same 0 2011
8,682,130 Method and device for packaging a substrate 0 2011
8,681,079 Interferometric optical modulator with broadband reflection characteristics 0 2011
8,638,491 Device having a conductive light absorbing mask and method for fabricating same 0 2012
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012
8,791,897 Method and system for writing data to MEMS display elements 0 2012
 
SILICON LIGHT MACHINES CORPORATION (47)
5,841,579 Flat diffraction grating light valve 182 1995
5,808,797 Method and apparatus for modulating a light beam 324 1996
5,982,553 Display device incorporating one-dimensional grating light-valve array 359 1997
6,088,102 Display apparatus including grating light-valve array and interferometric optical system 132 1997
6,271,808 Stereo head mounted display using a single display device 63 1998
6,130,770 Electron gun activated grating light valve 73 1998
6,101,036 Embossed diffraction grating alone and in combination with changeable image display 69 1998
6,215,579 Method and apparatus for modulating an incident light beam for forming a two-dimensional image 112 1998
6,956,878 Method and apparatus for reducing laser speckle using polarization averaging 31 2000
7,177,081 High contrast grating light valve type device 18 2001
6,764,875 Method of and apparatus for sealing an hermetic lid to a semiconductor die 28 2001
6,865,346 Fiber optic transceiver 4 2001
6,747,781 Method, apparatus, and diffuser for reducing laser speckle 65 2001
6,707,591 Angled illumination for a single order light modulator based projection system 4 2001
6,639,722 Stress tuned blazed grating light valve 8 2001
6,800,238 Method for domain patterning in low coercive field ferroelectrics 1 2002
6,782,205 Method and apparatus for dynamic equalization in wavelength division multiplexing 64 2002
6,991,953 Microelectronic mechanical system and methods 10 2002
6,767,751 Integrated driver process flow 5 2002
6,728,023 Optical device arrays with optimized image resolution 23 2002
7,054,515 Diffractive light modulator-based dynamic equalizer with integrated spectral monitor 1 2002
6,822,797 Light modulator structure for producing high-contrast operation using zero-order light 6 2002
6,872,984 Method of sealing a hermetic lid to a semiconductor die at an angle 25 2002
6,829,258 Rapidly tunable external cavity laser 30 2002
6,908,201 Micro-support structures 4 2002
6,813,059 Reduced formation of asperities in contact micro-structures 75 2002
6,714,337 Method and device for modulating a light beam and having an improved gamma response 8 2002
7,057,795 Micro-structures with individually addressable ribbon pairs 2 2002
6,801,354 2-D diffraction grating for substantially eliminating polarization dependent losses 10 2002
6,956,995 Optical communication arrangement 4 2002
6,712,480 Controlled curvature of stressed micro-structures 7 2002
7,049,164 Microelectronic mechanical system and methods 54 2002
6,928,207 Apparatus for selectively blocking WDM channels 2 2002
7,057,819 High contrast tilting ribbon blazed grating 4 2002
6,987,600 Arbitrary phase profile for better equalization in dynamic gain equalizer 1 2002
6,934,070 Chirped optical MEM device 4 2002
6,927,891 Tilt-able grating plane for improved crosstalk in 1×N blaze switches 3 2002
7,068,372 MEMS interferometer-based reconfigurable optical add-and-drop multiplexor 5 2003
7,286,764 Reconfigurable modulator-based optical add-and-drop multiplexer 3 2003
6,947,613 Wavelength selective switch and equalizer 1 2003
6,922,272 Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices 7 2003
7,391,973 Two-stage gain equalizer 1 2003
7,027,202 Silicon substrate as a light modulator sacrificial layer 55 2003
6,922,273 PDL mitigation structure for diffractive MEMS and gratings 2 2003
6,829,077 Diffractive light modulator with dynamically rotatable diffraction plane 3 2003
6,806,997 Patterned diffractive light modulator ribbon for PDL reduction 2 2003
7,042,611 Pre-deflected bias ribbons 0 2003
 
VENTURE LENDING & LEASING IV, INC. (43)
6,388,661 Monochrome and color digital display systems and methods 109 2000
6,356,378 Double substrate reflective spatial light modulator 258 2000
6,529,310 Deflectable spatial light modulator having superimposed hinge and deflectable element 71 2000
6,396,619 Deflectable spatial light modulator having stopping mechanisms 78 2000
6,523,961 Projection system and mirror elements for improved contrast ratio in spatial light modulators 90 2000
6,538,800 Reflective spatial light modulator with deflectable elements formed on a light transmissive substrate 48 2002
6,756,976 Monochrome and color digital display systems and methods for implementing the same 5 2002
6,690,502 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 5 2002
6,741,383 Deflectable micromirrors with stopping mechanisms 45 2002
7,099,065 Micromirrors with OFF-angle electrodes and stops 5 2003
6,798,561 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 11 2003
6,999,224 Micromirror modulation method and digital apparatus with improved grayscale 14 2004
7,300,162 Projection display 5 2004
7,196,740 Projection TV with improved micromirror array 7 2004
7,172,296 Projection display 9 2004
7,167,297 Micromirror array 2 2004
7,023,606 Micromirror array for projection TV 8 2004
7,018,052 Projection TV with improved micromirror array 5 2004
7,012,731 Packaged micromirror array for a projection display 4 2004
7,006,275 Packaged micromirror array for a projection display 5 2004
7,499,065 Asymmetrical switching delay compensation in display systems 8 2004
7,787,170 Micromirror array assembly with in-array pillars 20 2004
7,262,817 Rear projection TV with improved micromirror array 11 2004
7,436,572 Micromirrors and hinge structures for micromirror arrays in projection displays 2 2004
7,019,880 Micromirrors and hinge structures for micromirror arrays in projection displays 1 2004
6,980,349 Micromirrors with novel mirror plates 19 2004
7,113,322 Micromirror having offset addressing electrode 4 2004
6,947,200 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 158 2004
7,158,279 Spatial light modulators with non-uniform pixels 1 2004
7,092,143 Micromirror array device and a method for making the same 4 2004
7,215,458 Deflection mechanisms in micromirror devices 6 2004
7,023,607 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 9 2004
7,012,733 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 2 2004
7,375,873 Method of repairing micromirrors in spatial light modulators 3 2005
7,405,860 Spatial light modulators with light blocking/absorbing areas 3 2005
7,027,207 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 17 2005
7,009,754 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 89 2005
6,975,444 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 21 2005
7,671,428 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 1 2005
7,655,492 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 0 2005
7,573,111 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 0 2005
7,286,278 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 2 2005
7,295,363 Optical coating on light transmissive substrates of micromirror devices 1 2005
 
TEXAS INSTRUMENTS INCORPORATED (28)
4,710,732 Spatial light modulator and method 487 1984
4,662,746 Spatial light modulator and method 492 1985
4,956,619 Spatial light modulator 578 1988
4,954,789 Spatial light modulator 563 1989
5,142,405 Bistable DMD addressing circuit and method 337 1990
5,083,857 Multi-level deformable mirror device 531 1990
5,018,256 Architecture and process for integrating DMD with control circuit substrates 299 1990
5,192,395 Method of making a digital flexure beam accelerometer 203 1990
5,223,971 Light beam steering with deformable membrane device 12 1991
5,231,532 Switchable resonant filter for optical radiation 244 1992
5,348,619 Metal selective polymer removal 74 1992
5,280,277 Field updated deformable mirror device 331 1992
5,526,688 Digital flexure beam accelerometer and method 209 1994
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 241 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 405 1995
6,737,225 Method of undercutting micro-mechanical device with super-critical carbon dioxide 10 2001
6,951,769 Method for stripping sacrificial layer in MEMS assembly 10 2003
6,806,993 Method for lubricating MEMS components 23 2003
7,362,493 Micromirror and post arrangements on substrates 3 2005
7,075,702 Micromirror and post arrangements on substrates 14 2005
7,432,572 Method for stripping sacrificial layer in MEMS assembly 1 2005
7,403,324 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 2 2006
8,493,288 System and method for color-specific sequence scaling for sequential color systems 1 2006
7,737,989 System and method for computing color correction coefficients 5 2006
8,305,391 System and method to generate multiprimary signals 1 2006
7,751,114 System and apparatus for repairing micromirrors in spatial light modulators 0 2007
8,693,082 Micromirror array assembly with in-array pillars 0 2010
8,542,244 System and method to generate multiprimary signals 0 2012
 
Miradia Inc. (26)
7,026,695 Method and apparatus to reduce parasitic forces in electro-mechanical systems 8 2003
7,118,234 Reflective spatial light modulator 5 2004
7,092,140 Architecture of a reflective spatial light modulator 9 2004
7,022,245 Fabrication of a reflective spatial light modulator 10 2004
7,449,284 Method and structure for fabricating mechanical mirror structures using backside alignment techniques 0 2004
7,034,984 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge 34 2004
6,992,810 High fill ratio reflective spatial light modulator with hidden hinge 36 2004
7,042,619 Mirror structure with single crystal silicon cross-member 21 2004
7,068,417 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 26 2004
7,206,110 Memory cell dual protection 4 2004
7,172,921 Method and structure for forming an integrated spatial light modulator 4 2005
7,199,918 Electrical contact method and structure for deflection devices formed in an array configuration 0 2005
7,142,349 Method and structure for reducing parasitic influences of deflection devices on spatial light modulators 0 2005
7,298,539 Co-planar surface and torsion device mirror structure and method of manufacture for optical displays 1 2005
7,202,989 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate 2 2005
7,190,508 Method and structure of patterning landing pad structures for spatial light modulators 1 2005
7,184,195 Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator 48 2005
7,502,158 Method and structure for high fill factor spatial light modulator with integrated spacer layer 0 2005
7,369,297 Mirror structure with single crystal silicon cross-member 2 2005
7,233,428 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 4 2006
7,670,880 Method and structure for forming an integrated spatial light modulator 1 2007
7,382,519 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate 1 2007
7,570,416 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 0 2007
7,428,094 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge 0 2007
8,207,004 Method and structure for forming a gyroscope and accelerometer 2 2009
8,530,259 Method and structure for forming a gyroscope and accelerometer 0 2012
 
LOCKHEED MARTIN CORPORATION (13)
8,475,506 VCSEL array stimulator apparatus and method for light stimulation of bodily tissues 2 2008
8,160,696 Nerve stimulator and method using simultaneous electrical and optical signals 8 2009
8,357,187 Hybrid optical-electrical probes for stimulation of nerve or other animal tissue 1 2011
8,864,806 Optical bundle apparatus and method for optical and/or electrical nerve stimulation of peripheral nerves 0 2011
8,652,187 Cuff apparatus and method for optical and/or electrical nerve stimulation of peripheral nerves 0 2011
8,506,613 Miniature method and apparatus for optical stimulation of nerves and other animal tissue 0 2011
8,709,078 Ocular implant with substantially constant retinal spacing for transmission of nerve-stimulation light 0 2011
8,317,848 Vestibular implant and method for optical stimulation of nerves 0 2011
8,840,654 Cochlear implant using optical stimulation with encoded information designed to limit heating effects 0 2012
8,834,545 Optical-stimulation cochlear implant with electrode(s) at the apical end for electrical stimulation of apical spiral ganglion cells of the cochlea 0 2012
8,747,447 Cochlear implant and method enabling enhanced music perception 0 2012
8,551,150 Method and system for optical stimulation of nerves 0 2012
8,632,577 Hybrid optical-electrical probes for stimulation of nerve or other animal tissue 0 2013
 
RAMBUS DELAWARE LLC (11)
8,272,770 TIR switched flat panel display 3 2009
8,152,352 Optic system for light guide with controlled output 4 2009
7,808,697 TIR light valve 1 2009
8,297,818 Optical system with reflectors and light pipes 0 2009
8,152,318 Optical system for a light emitting diode with collection, conduction, phosphor directing, and output means 0 2009
8,651,724 TIR switched flat panel display 0 2009
8,641,257 Optic system for light guide with controlled output 0 2009
8,395,843 TIR light valve 0 2010
8,733,982 Internal collecting reflector optics for LEDs 0 2010
8,292,445 Optical system for a light emitting diode with collection, conduction, phosphor directing, and output means 0 2012
8,827,531 Lighting assembly 0 2012
 
MICRONIC LASER SYSTEMS AB (10)
6,747,783 Pattern generator 227 2000
6,624,880 Method and apparatus for microlithography 20 2001
6,987,599 Pattern generator mirror configurations 5 2003
7,009,753 Pattern generator 11 2004
7,372,617 Hidden hinge MEMS device 0 2005
7,365,901 Pattern generator 2 2005
7,800,815 Pattern generator 0 2007
7,567,375 Hidden hinge MEMS device 1 2008
7,787,174 Pattern generator 0 2009
7,710,634 Pattern generator 2 2009
 
MICRON TECHNOLOGY, INC. (8)
5,391,259 Method for forming a substantially uniform array of sharp tips 111 1994
5,695,658 Non-photolithographic etch mask for submicron features 34 1996
5,753,130 Method for forming a substantially uniform array of sharp tips 6 1996
5,811,020 Non-photolithographic etch mask for submicron features 24 1997
6,080,325 Method of etching a substrate and method of forming a plurality of emitter tips 6 1998
6,165,374 Method of forming an array of emitter tips 1 1999
6,126,845 Method of forming an array of emmitter tips 6 1999
6,423,239 Methods of making an etch mask and etching a substrate using said etch mask 3 2000
 
AURA SYSTEMS, INC. (6)
5,150,205 Actuated mirror optical intensity modulation 57 1989
5,126,836 Actuated mirror optical intensity modulation 86 1989
5,245,369 Scene projector 28 1991
5,175,465 Piezoelectric and electrostrictive actuators 36 1991
5,159,225 Piezoelectric actuator 36 1991
5,260,798 Pixel intensity modulator 53 1992
 
SEIKO EPSON CORPORATION (6)
5,999,306 Method of manufacturing spatial light modulator and electronic device employing it 128 1996
6,107,115 Method of manufacturing spatial light modulator and electronic device employing it 64 1999
6,271,955 Method of manufacturing spatial light modulator and electronic device employing it 17 2000
6,518,700 Organic light-emitting devices 78 2000
6,452,712 Method of manufacturing spatial light modulator and electronic device employing it 92 2001
6,650,461 Method of manufacturing spatial light modulator and electronic device employing it 40 2002
 
DIGITAL PROJECTION LIMITED (5)
5,686,939 Spatial light modulators 32 1993
6,034,660 Spatial light modulators 16 1996
6,064,366 Spatial light modulators 13 1997
6,243,057 Deformable mirror device driving circuit and method 5 1999
6,184,852 Spatial light modulators 11 1999
 
OCLARO TECHNOLOGY PLC (5)
6,914,711 Spatial light modulator with hidden comb actuator 40 2003
7,015,885 MEMS devices monolithically integrated with drive and control circuitry 30 2004
7,071,109 Methods for fabricating spatial light modulators with hidden comb actuators 10 2005
7,075,701 Light modulator with integrated drive and control circuitry 23 2005
7,375,874 Light modulator with integrated drive and control circuitry 14 2006
 
EVANS & SUTHERLAND COMPUTER CORPORATION (4)
7,891,818 System and method for aligning RGB light in a single modulator projector 3 2007
8,358,317 System and method for displaying a planar image on a curved surface 2 2009
8,702,248 Projection method for reducing interpixel gaps on a viewing surface 0 2009
8,077,378 Calibration system and method for light modulation device 0 2009
 
NP PHOTONICS, INC. (3)
6,665,109 Compliant mechanism and method of forming same 6 2002
6,678,084 Methods of making mechanisms in which relative locations of elements are maintained during manufacturing 0 2002
6,747,775 Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same 11 2002
 
ALTMAN STAGE LIGHTING CO., INC. (2)
6,671,005 Digital micromirror stage lighting system 28 1999
6,412,972 Digital light protection apparatus with digital micromirror device and rotatable housing 43 1999
 
FUJI PHOTO FILM CO., LTD. (2)
4,717,241 Light deflection device 15 1985
7,046,422 Reflection-type light modulating array element and exposure apparatus 85 2004
 
KENT DISPLAYS INCORPORATED (2)
7,796,103 Drapable liquid crystal transfer display films 3 2005
8,199,086 Stacked color photodisplay 1 2008
 
SUMITOMO ELECTRIC INDUSTRIES, LTD. (2)
5,188,984 Semiconductor device and production method thereof 57 1991
5,729,074 Micro mechanical component and production process thereof 22 1995
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
6,841,081 Method for manufacturing reflective spatial light modulator mirror devices 84 2003
7,057,794 Micromirror for MEMS device 5 2004
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
6,004,832 Method of fabricating an electrostatic ultrasonic transducer 50 1997
7,092,138 Elastomer spatial light modulators for extreme ultraviolet lithography 2 2004
 
ULTRATECH, INC. (2)
6,833,908 Computer architecture for and method of high-resolution imaging using a low-resolution image transducer 4 2001
7,671,966 Computer architecture for and method of high-resolution imaging using a low-resolution image transducer 0 2004
 
CENTOCOR ORTHO BIOTECH INC. (1)
7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof 26 2004
 
COLIBRYS SA (1)
5,579,149 Miniature network of light obturators 231 1994
 
CORDATA, INC. (BVI) (1)
5,266,531 Dynamic holographic display with cantilever 6 1992
 
CORNELL UNIVERSITY (1)
6,093,330 Microfabrication process for enclosed microstructures 52 1997
 
ELECTRO SCIENTIFIC INDUSTRIES, INC. (1)
7,989,320 Die bonding 5 2004
 
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. (1)
6,595,055 Micromechanical component comprising an oscillating body 13 2001
 
FSI INTERNATIONAL, INC. (1)
RE36006 Metal selective polymer removal 2 1996
 
HUGHES ELECTRONICS CORPORATION (1)
4,828,368 Near bandgap radiation modulation spatial light modulators 8 1986
 
INTEL CORPORATION (1)
6,346,430 Packaged integrated processor and spatial light modulator 43 2000
 
IPG PHOTONICS CORPORATION (1)
5,262,000 Method for making micromechanical switch 116 1992
 
IRIDIGM DISPLAY CORPORATION (1)
7,256,922 Interferometric modulators with thin film transistors 33 2004
 
KENT STATE UNIVERSITY (1)
8,329,058 Chiral nematic photo displays 0 2007
 
LUCENT TECHNOLOGIES INC. (1)
6,030,903 Non-destructive method for gauging undercut in a hidden layer 2 1998
 
MASSACHUSETTS EYE & EAR INFIRMARY (1)
8,744,570 Optical stimulation of the brainstem and/or midbrain, including auditory areas 0 2010
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
5,875,008 Liquid crystal panel and projection display with use of liquid crystal panel 23 1997
 
MICRONIC MYDATA AB (1)
7,957,055 Pattern generator 0 2010
 
NATIONAL SEMICONDUCTOR CORPORATION (1)
6,900,110 Chip scale package with compliant leads 5 2002
 
NORTEL NETWORKS UK LIMITED (1)
6,513,939 Micro-mirrors with variable focal length, and optical components comprising micro-mirrors 24 2002
 
Northrop Corporation (1)
5,170,283 Silicon spatial light modulator 165 1991
 
OMM, Inc. (1)
6,567,574 Modular three-dimensional optical switch 32 2000
 
PDACO LTD. (1)
5,424,866 Dynamic holographic display with cantilever 22 1993
 
QUALCOMM INCORPORATED (1)
7,709,964 Structure of a micro electro mechanical system and the manufacturing method thereof 7 2007
 
Qualcomm Mems Technologies Co., Ltd. (1)
7,172,915 Optical-interference type display panel and method for making the same 74 2004
 
RAMBUS INTERNATIONAL LTD. (1)
8,366,302 Internal collecting reflector optics for LEDs 0 2010
 
RANK BRIMAR LIMITED (1)
5,471,584 Spatial light modulator with sub-divided modulation elements 13 1993
 
RANK CINTEL LIMITED (1)
5,369,433 Recording video signals on cinematographic film using a deformable mirror device 43 1992
 
REMBRANDT COMMUNICATIONS, LP (1)
6,470,110 Monolithic integration of control elements and micro-mirror in an optical switch 13 2000
 
SAMSUNG ELECTRO-MECHANICS CO., LTD. (1)
5,748,172 Mirror driving method and apparatus of micro-mirror array 111 1996
 
SOLUS MICRO TECHNOLOGIES, INC. (1)
6,597,461 Tunable fabry-perot interferometer using entropic materials 8 2001
 
SONY CORPORATION (1)
8,142,669 Electromechanical element, electric circuit device and production method of those 1 2007
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (1)
4,740,410 Micromechanical elements and methods for their fabrication 125 1987
 
THE TEXAS A&M UNIVERSITY SYSTEM (1)
7,282,706 Advanced optics for rapidly patterned laser profiles in analytical spectrometry 2 2005
 
The United States of America as represented by the Secretary of the Air Force (1)
4,698,602 Micromirror spatial light modulator 91 1985
 
THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL (1)
5,170,269 Programmable optical interconnect system 78 1991
 
U.S. Philips Corporation (1)
5,238,435 Liquid crystal display device and method of manufacturing such a display device 9 1992
 
UDC, LLC (1)
7,499,208 Current mode display driver circuit realization feature 9 2005
 
VANDERBILT UNIVERSITY (1)
8,498,699 Method and nerve stimulator using simultaneous electrical and optical signals 2 2011
 
VICTOR COMPANY OF JAPAN, LTD. (1)
5,298,432 Method of fabricating an isolated pixel photoconductive structure 3 1991
 
VIVIDON, INC. (1)
6,747,784 Compliant mechanism and method of forming same 5 2002