Spatial light modulator and method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 4566935
SERIAL NO

06635967

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Methods of fabrication of spatial light modulators with deflectable beams by plasma etching after dicing of a substrate into chips, each of the chips an SLM, is disclosed. Also, various architectures available with such plasma etching process are disclosed and include metal cloverleafs for substrate addressing, metal flaps formed in a reflecting layer over a photoresist spacer layer, and torsion hinged flaps in a reflecting layer.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX17077

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hornbeck, Larry J Van Alstyne, TX 35 12321

Cited Art Landscape

Patent Info (Count) # Cites Year
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
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Honeywell Inc. (1)
* 4472239 Method of making semiconductor device 86 1983
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Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (6)
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7420728 Methods of fabricating interferometric modulators by selectively removing a material 20 2005
7405924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 12 2005
7368803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 10 2005
7299681 Method and system for detecting leak in electronic devices 5 2005
* 2006/0077,502 Methods of fabricating interferometric modulators by selectively removing a material 0 2005
* 2006/0076,311 Methods of fabricating interferometric modulators by selectively removing a material 3 2005
* 2006/0067,642 Method and device for providing electronic circuitry on a backplate 9 2005
* 2006/0065,043 Method and system for detecting leak in electronic devices 1 2005
* 2006/0066,932 Method of selective etching using etch stop layer 70 2005
* 2005/0250,235 Controlling electromechanical behavior of structures within a microelectromechanical systems device 25 2005
7920135 Method and system for driving a bi-stable display 13 2005
7679627 Controller and driver features for bi-stable display 10 2005
7586484 Controller and driver features for bi-stable display 25 2005
7535466 System with server based control of client device display features 23 2005
7532195 Method and system for reducing power consumption in a display 10 2005
7302157 System and method for multi-level brightness in interferometric modulation 66 2005
7289256 Electrical characterization of interferometric modulators 16 2005
* 2006/0077,523 Electrical characterization of interferometric modulators 7 2005
* 2006/0066,597 Method and system for reducing power consumption in a display 38 2005
* 2006/0066,504 System with server based control of client device display features 44 2005
* 2006/0067,643 System and method for multi-level brightness in interferometric modulation 1 2005
* 2006/0066,503 Controller and driver features for bi-stable display 41 2005
* 2006/0066,596 System and method of transmitting video data 30 2005
* 2006/0066,595 Method and system for driving a bi-stable display 36 2005
7602375 Method and system for writing data to MEMS display elements 8 2005
* 2006/0066,559 Method and system for writing data to MEMS display elements 33 2005
7916103 System and method for display device with end-of-life phenomena 2 2005
* 2006/0076,634 Method and system for packaging MEMS devices with incorporated getter 19 2005
7321456 Method and device for corner interferometric modulation 62 2005
* 2006/0077,515 Method and device for corner interferometric modulation 1 2005
7626581 Device and method for display memory using manipulation of mechanical response 8 2005
7372613 Method and device for multistate interferometric light modulation 91 2005
* 2006/0077,505 Device and method for display memory using manipulation of mechanical response 36 2005
* 2006/0077,508 Method and device for multistate interferometric light modulation 1 2005
7889163 Drive method for MEMS devices 26 2005
7692839 System and method of providing MEMS device with anti-stiction coating 4 2005
7420725 Device having a conductive light absorbing mask and method for fabricating same 68 2005
* 2006/0077,503 System and method of providing MEMS device with anti-stiction coating 30 2005
* 2006/0077,516 Device having a conductive light absorbing mask and method for fabricating same 2 2005
* 2006/0044,928 Drive method for MEMS devices 109 2005
7405861 Method and device for protecting interferometric modulators from electrostatic discharge 5 2005
* 2006/0077,504 Method and device for protecting interferometric modulators from electrostatic discharge 6 2005
7843410 Method and device for electrically programmable display 6 2005
7719500 Reflective display pixels arranged in non-rectangular arrays 57 2005
7547565 Method of manufacturing optical interference color display 21 2005
7527995 Method of making prestructure for MEMS systems 46 2005
* 2006/0177,950 Method of manufacturing optical interferance color display 16 2005
* 2006/0066,598 Method and device for electrically programmable display 68 2005
* 2006/0066,599 Reflective display pixels arranged in non-rectangular arrays 65 2005
7808703 System and method for implementation of interferometric modulator displays 6 2005
7349136 Method and device for a display having transparent components integrated therein 11 2005
* 2006/0077,393 System and method for implementation of interferometric modulator displays 14 2005
RE42119 Microelectrochemical systems device and method for fabricating same 14 2005
8008736 Analog interferometric modulator device 13 2005
7710629 System and method for display device with reinforcing substance 7 2005
* 2006/0066,600 System and method for display device with reinforcing substance 14 2005
8124434 Method and system for packaging a display 7 2005
7554714 Device and method for manipulation of thermal response in a modulator 42 2005
7471444 Interferometric modulation of radiation 21 2005
7388706 Photonic MEMS and structures 29 2005
7345805 Interferometric modulator array with integrated MEMS electrical switches 26 2005
7196837 Area array modulation and lead reduction in interferometric modulators 49 2005
* 2006/0103,613 Interferometric modulator array with integrated MEMS electrical switches 12 2005
* 2006/0076,637 Method and system for packaging a display 12 2005
* 2006/0077,152 Device and method for manipulation of thermal response in a modulator 49 2005
* 2005/0286,114 Interferometric modulation of radiation 31 2005
* 2005/0286,113 Photonic MEMS and structures 31 2005
7130104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 84 2005
* 2006/0077,527 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 2 2005
8004504 Reduced capacitance display element 9 2005
7553684 Method of fabricating interferometric devices using lift-off processing techniques 8 2005
* 2006/0067,644 Method of fabricating interferometric devices using lift-off processing techniques 3 2005
7417783 Mirror and mirror layer for optical modulator and method 10 2005
7373026 MEMS device fabricated on a pre-patterned substrate 18 2005
7343080 System and method of testing humidity in a sealed MEMS device 11 2005
* 2006/0077,518 Mirror and mirror layer for optical modulator and method 5 2005
* 2006/0067,646 MEMS device fabricated on a pre-patterned substrate 0 2005
RE40436 Hermetic seal and method to create the same 14 2005
8878825 System and method for providing a variable refresh rate of an interferometric modulator display 0 2005
* 2006/0066,601 System and method for providing a variable refresh rate of an interferometric modulator display 50 2005
* 2006/0103,643 Measuring and modeling power consumption in displays 31 2005
7304784 Reflective display device having viewable display on both sides 63 2005
* 2006/0077,155 Reflective display device having viewable display on both sides 14 2005
7161730 System and method for providing thermal compensation for an interferometric modulator display 95 2005
7567373 System and method for micro-electromechanical operation of an interferometric modulator 47 2005
* 2006/0024,880 System and method for micro-electromechanical operation of an interferometric modulator 135 2005
7936497 MEMS device having deformable membrane characterized by mechanical persistence 15 2005
7463421 Method and device for modulating light 27 2005
* 2006/0077,156 MEMS device having deformable membrane characterized by mechanical persistence 71 2005
* 2006/0028,708 Method and device for modulating light 28 2005
7317568 System and method of implementation of interferometric modulators for display mirrors 4 2005
7310179 Method and device for selective adjustment of hysteresis window 13 2005
* 2006/0077,521 System and method of implementation of interferometric modulators for display mirrors 6 2005
7724993 MEMS switches with deforming membranes 2 2005
7492502 Method of fabricating a free-standing microstructure 13 2005
7417735 Systems and methods for measuring color and contrast in specular reflective devices 60 2005
7369296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 24 2005
* 2006/0077,528 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 9 2005
* 2006/0077,529 Method of fabricating a free-standing microstructure 25 2005
* 2006/0067,648 MEMS switches with deforming membranes 39 2005
* 2006/0066,856 Systems and methods for measuring color and contrast in specular reflective devices 2 2005
7630119 Apparatus and method for reducing slippage between structures in an interferometric modulator 34 2005
* 2006/0067,649 Apparatus and method for reducing slippage between structures in an interferometric modulator 61 2005
7136213 Interferometric modulators having charge persistence 23 2005
* 2006/0066,542 Interferometric modulators having charge persistence 9 2005
7564612 Photonic MEMS and structures 92 2005
7327510 Process for modifying offset voltage characteristics of an interferometric modulator 240 2005
* 2006/0067,651 Photonic MEMS and structures 97 2005
* 2006/0067,650 Method of making a reflective display device using thin film transistor production techniques 17 2005
7369294 Ornamental display device 59 2005
7710636 Systems and methods using interferometric optical modulators and diffusers 30 2005
7684104 MEMS using filler material and method 17 2005
* 2006/0066,936 Interferometric optical modulator using filler material and method 65 2005
7653371 Selectable capacitance circuit 30 2005
* 2006/0077,617 Selectable capacitance circuit 22 2005
7415186 Methods for visually inspecting interferometric modulators for defects 7 2005
* 2006/0067,652 Methods for visually inspecting interferometric modulators for defects 4 2005
7675669 Method and system for driving interferometric modulators 5 2005
7453579 Measurement of the dynamic characteristics of interferometric modulators 14 2005
7545550 Systems and methods of actuating MEMS display elements 7 2005
* 2006/0066,560 Systems and methods of actuating MEMS display elements 63 2005
8310441 Method and system for writing data to MEMS display elements 1 2005
7446927 MEMS switch with set and latch electrodes 7 2005
* 2006/0066,937 MEMS SWITCH WITH SET AND LATCH ELECTRODES 45 2005
7486429 Method and device for multistate interferometric light modulation 17 2005
* 2006/0066,938 Method and device for multistate interferometric light modulation 55 2005
7236284 Photonic MEMS and structures 112 2005
7630114 Diffusion barrier layer for MEMS devices 10 2005
* 2007/0096,300 Diffusion barrier layer for MEMS devices 19 2005
8014059 System and method for charge control in a MEMS device 7 2005
7776631 MEMS device and method of forming a MEMS device 28 2005
* 2007/0058,095 System and method for charge control in a MEMS device 11 2005
7618831 Method of monitoring the manufacture of interferometric modulators 2 2005
7403323 Process control monitors for interferometric modulators 3 2005
7369252 Process control monitors for interferometric modulators 2 2005
7259865 Process control monitors for interferometric modulators 22 2005
* 2006/0077,381 Process control monitors for interferometric modulators 3 2005
* 2006/0066,872 Process control monitors for interferometric modulators 1 2005
8391630 System and method for power reduction when decompressing video streams for interferometric modulator displays 1 2005
* 2007/0147,688 System and method for power reduction when decompressing video streams for interferometric modulator displays 12 2005
7795061 Method of creating MEMS device cavities by a non-etching process 6 2005
7355779 Method and system for driving MEMS display elements 6 2006
* 2007/0053,652 Method and system for driving MEMS display elements 30 2006
7916980 Interconnect structure for MEMS device 11 2006
* 2007/0189,654 Interconnect structure for MEMS device 6 2006
7382515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 16 2006
* 2007/0170,540 Silicon-rich silicon nitrides as etch stops in MEMS manufature 4 2006
8194056 Method and system for writing data to MEMS display elements 2 2006
7582952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 4 2006
* 2007/0194,414 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 6 2006
7547568 Electrical conditioning of MEMS device and insulating layer thereof 10 2006
* 2007/0196,944 Electrical conditioning of MEMS device and insulating layer thereof 9 2006
7550810 MEMS device having a layer movable at asymmetric rates 48 2006
* 2007/0194,630 MEMS device having a layer movable at asymmetric rates 31 2006
7450295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 60 2006
* 2007/0206,267 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 10 2006
7483197 Photonic MEMS and structures 27 2006
7616369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 14 2006
7532377 Movable micro-electromechanical device 59 2006
7643203 Interferometric optical display system with broadband characteristics 34 2006
7948457 Systems and methods of actuating MEMS display elements 1 2006
* 2006/0250,350 Systems and methods of actuating MEMS display elements 22 2006
7903047 Mode indicator for interferometric modulator displays 4 2006
* 2007/0242,008 Mode indicator for interferometric modulator displays 33 2006
7711239 Microelectromechanical device and method utilizing nanoparticles 17 2006
7623287 Non-planar surface structures and process for microelectromechanical systems 19 2006
7527996 Non-planar surface structures and process for microelectromechanical systems 13 2006
7417784 Microelectromechanical device and method utilizing a porous surface 64 2006
* 2007/0249,079 Non-planar surface structures and process for microelectromechanical systems 17 2006
* 2007/0249,078 Non-planar surface structures and process for microelectromechanical systems 30 2006
* 2007/0249,081 Non-planar surface structures and process for microelectromechanical systems 13 2006
8049713 Power consumption optimized display update 2 2006
7920136 System and method of driving a MEMS display device 1 2006
7706044 Optical interference display cell and method of making the same 12 2006
* 2006/0250,335 System and method of driving a MEMS display device 18 2006
7880954 Integrated modulator illumination 25 2006
7369292 Electrode and interconnect materials for MEMS devices 24 2006
7349139 System and method of illuminating interferometric modulators using backlighting 28 2006
* 2006/0209,384 System and method of illuminating interferometric modulators using backlighting 0 2006
* 2006/0198,013 Integrated modulator illumination 32 2006
8174469 Dynamic driver IC and display panel configuration 0 2006
* 2006/0279,495 Dynamic driver IC and display panel configuration 5 2006
7848001 Method and system for interferometric modulation in projection or peripheral devices 16 2006
7907319 Method and device for modulating light with optical compensation 34 2006
* 2006/0274,400 Method and device for modulating light with optical compensation 70 2006
7161094 Modifying the electro-mechanical behavior of devices 42 2006
* 2006/0219,435 Modifying the electro-mechanical behavior of devices 0 2006
7372619 Display device having a movable structure for modulating light and method thereof 102 2006
* 2006/0274,074 Display device having a movable structure for modulating light and method thereof 2 2006
7649671 Analog interferometric modulator device with electrostatic actuation and release 32 2006
7405863 Patterning of mechanical layer in MEMS to reduce stresses at supports 16 2006
7321457 Process and structure for fabrication of MEMS device having isolated edge posts 88 2006
* 2007/0279,753 Patterning of mechanical layer in MEMS to reduce stresses at supports 3 2006
7187489 Photonic MEMS and structures 107 2006
* 2006/0284,877 Photonic mems and structures 0 2006
7636151 System and method for providing residual stress test structures 2 2006
7471442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 13 2006
* 2007/0290,961 Method and apparatus for low range bit depth enhancement for MEMS display architectures 3 2006
* 2007/0177,129 System and method for providing residual stress test structures 4 2006
7702192 Systems and methods for driving MEMS display 1 2006
7835061 Support structures for free-standing electromechanical devices 18 2006
7385744 Support structure for free-standing MEMS device and methods for forming the same 61 2006
* 2008/0055,707 Support structure for free-standing MEMS device and methods for forming the same 37 2006
7777715 Passive circuits for de-multiplexing display inputs 4 2006
7527998 Method of manufacturing MEMS devices providing air gap control 20 2006
7388704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 6 2006
* 2008/0003,737 Method of manufacturing MEMS devices providing air gap control 3 2006
* 2008/0002,210 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 0 2006
7936031 MEMS devices having support structures 12 2006
7679812 Support structure for MEMS device and methods therefor 52 2006
7566940 Electromechanical devices having overlying support structures 24 2006
7534640 Support structure for MEMS device and methods therefor 23 2006
* 2007/0047,900 MEMS devices having support structures and methods of fabricating the same 14 2006
* 2007/0019,922 Support structure for MEMS device and methods therefor 4 2006
7830586 Transparent thin films 34 2006
7554711 MEMS devices with stiction bumps 67 2006
* 2006/0262,380 MEMS devices with stiction bumps 93 2006
7763546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 10 2006
7566664 Selective etching of MEMS using gaseous halides and reactive co-etchants 47 2006
* 2008/0043,315 High profile contacts for microelectromechanical systems 8 2006
7747109 MEMS device having support structures configured to minimize stress-related deformation and methods for fabricating same 12 2006
7704773 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 11 2006
7486867 Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge 15 2006
* 2007/0042,524 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 25 2006
7928940 Drive method for MEMS devices 0 2006
* 2007/0024,550 Drive method for MEMS devices 4 2006
7301704 Moveable micro-electromechanical device 22 2006
* 2007/0008,607 Moveable micro-electromechanical device 1 2006
7898722 Microelectromechanical device with restoring electrode 51 2006
7545552 Sacrificial spacer process and resultant structure for MEMS support structure 11 2006
* 2008/0094,686 Sacrificial spacer process and resultant structure for MEMS support structure 9 2006
7619810 Systems and methods of testing micro-electromechanical devices 8 2006
* 2008/0088,638 Systems and methods of testing micro-electromechanical devices 1 2006
7388697 System and method for addressing a MEMS display 16 2006
7242512 System and method for addressing a MEMS display 16 2006
* 2007/0035,804 System and method for addressing a MEMS display 0 2006
7667884 Interferometric modulators having charge persistence 6 2006
* 2007/0041,079 Interferometric modulators having charge persistence 2 2006
7511875 Moveable micro-electromechanical device 10 2006
8284474 Method and system for interferometric modulation in projection or peripheral devices 6 2007
* 2007/0132,843 METHOD AND SYSTEM FOR INTERFEROMETRIC MODULATION IN PROJECTION OR PERIPHERAL DEVICES 40 2007
7872792 Method and device for modulating light with multiple electrodes 25 2007
* 2007/0177,247 Method and device for modulating light with multiple electrodes 85 2007
7846344 Method and device for modulating light 7 2007
7733552 MEMS cavity-coating layers and methods 11 2007
* 2008/0231,931 MEMS CAVITY-COATING LAYERS AND METHODS 8 2007
8059326 Display devices comprising of interferometric modulator and sensor 16 2007
* 2007/0253,054 DISPLAY DEVICES COMPRISING OF INTERFEROMETRIC MODULATOR AND SENSOR 75 2007
7532381 Method of making a light modulating display device and associated transistor circuitry and structures thereof 33 2007
* 2007/0229,936 METHOD OF MAKING A LIGHT MODULATING DISPLAY DEVICE AND ASSOCIATED TRANSISTOR CIRCUITRY AND STRUCTURES THEREOF 48 2007
7569488 Methods of making a MEMS device by monitoring a process parameter 44 2007
* 2008/0318,344 INDICATION OF THE END-POINT REACTION BETWEEN XeF2 AND MOLYBDENUM 2 2007
8068268 MEMS devices having improved uniformity and methods for making them 1 2007
* 2009/0009,444 MEMS DEVICES HAVING IMPROVED UNIFORMITY AND METHODS FOR MAKING THEM 8 2007
7642110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 24 2007
* 2008/0026,328 METHOD FOR FABRICATING A STRUCTURE FOR A MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE 36 2007
7723015 Method for manufacturing an array of interferometeric modulators 19 2007
* 2007/0269,748 METHOD FOR MANUFACTURING AN ARRAY OF INTERFEROMETRIC MODULATORS 31 2007
8081369 System and method for a MEMS device 9 2007
7852545 Method and device for modulating light 30 2007
7848004 System and method for a MEMS device 17 2007
7839556 Method and device for modulating light 8 2007
7830587 Method and device for modulating light with semiconductor substrate 31 2007
7826120 Method and device for multi-color interferometric modulation 30 2007
7808694 Method and device for modulating light 31 2007
7800809 System and method for a MEMS device 8 2007
7738157 System and method for a MEMS device 36 2007
* 2008/0088,912 SYSTEM AND METHOD FOR A MEMS DEVICE 88 2007
* 2008/0088,910 SYSTEM AND METHOD FOR A MEMS DEVICE 95 2007
* 2008/0088,908 SYSTEM AND METHOD FOR A MEMS DEVICE 5 2007
* 2008/0084,601 SYSTEM AND METHOD FOR A MEMS DEVICE 7 2007
* 2008/0036,795 METHOD AND DEVICE FOR MODULATING LIGHT 5 2007
* 2008/0037,093 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 90 2007
8072402 Interferometric optical modulator with broadband reflection characteristics 12 2007
* 2009/0059,346 Interferometric Optical Modulator With Broadband Reflection Characteristics 26 2007
7719752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 9 2007
* 2008/0279,498 MEMS STRUCTURES, METHODS OF FABRICATING MEMS COMPONENTS ON SEPARATE SUBSTRATES AND ASSEMBLY OF SAME 43 2007
7564613 Microelectromechanical device and method utilizing a porous surface 17 2007
7709964 Structure of a micro electro mechanical system and the manufacturing method thereof 8 2007
* 2008/0041,817 STRUCTURE OF A MICRO ELECTRO MECHANICAL SYSTEM AND THE MANUFACTURING METHOD THEREOF 17 2007
7556917 Method for manufacturing an array of interferometric modulators 21 2007
7561321 Process and structure for fabrication of MEMS device having isolated edge posts 40 2007
7623752 System and method of testing humidity in a sealed MEMS device 7 2008
7570865 System and method of testing humidity in a sealed MEMS device 3 2008
* 2008/0115,569 SYSTEM AND METHOD OF TESTING HUMIDITY IN A SEALED MEMS DEVICE 1 2008
* 2008/0115,596 SYSTEM AND METHOD OF TESTING HUMIDITY IN A SEALED MEMS DEVICE 0 2008
8105496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer 8 2008
8040588 System and method of illuminating interferometric modulators using backlighting 2 2008
* 2009/0225,394 SYSTEM AND METHOD OF ILLUMINATING INTERFEROMETRIC MODULATORS USING BACKLIGHTING 21 2008
* 2008/0157,413 METHOD OF MANUFACTURING OPTICAL INTERFERENCE COLOR DISPLAY 10 2008
8064124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 10 2008
* 2008/0226,929 SILICON-RICH SILICON NITRIDES AS ETCH STOP IN MEMS MANUFACTURE 20 2008
8115988 System and method for micro-electromechanical operation of an interferometric modulator 6 2008
* 2009/0022,884 SYSTEM AND METHOD FOR MICRO-ELECTROMECHANICAL OPERATION OF AN INTERFEROMETRIC MODULATOR 17 2008
8416487 Photonic MEMS and structures 5 2009
7791787 Moveable micro-electromechanical device 8 2009
* 2009/0135,463 MOVEABLE MICRO-ELECTROMECHANICAL DEVICE 2 2009
7830588 Method of making a light modulating display device and associated transistor circuitry and structures thereof 40 2009
7864403 Post-release adjustment of interferometric modulator reflectivity 5 2009
8735225 Method and system for packaging MEMS devices with glass seal 0 2009
8368124 Electromechanical devices having etch barrier layers 6 2009
* 2009/0323,168 ELECTROMECHANICAL DEVICES AND METHODS OF FABRICATING SAME 17 2009
7875485 Methods of fabricating MEMS devices having overlying support structures 14 2009
8422108 Method and device for modulating light with optical compensation 6 2009
8736590 Low voltage driver scheme for interferometric modulators 0 2010
7835093 Methods for forming layers within a MEMS device using liftoff processes 12 2010
* 2010/0200,938 METHODS FOR FORMING LAYERS WITHIN A MEMS DEVICE USING LIFTOFF PROCESSES 3 2010
8218229 Support structure for MEMS device and methods therefor 6 2010
8149497 Support structure for MEMS device and methods therefor 7 2010
* 2010/0147,790 SUPPORT STRUCTURE FOR MEMS DEVICE AND METHODS THEREFOR 13 2010
* 2010/0149,627 SUPPORT STRUCTURE FOR MEMS DEVICE AND METHODS THEREFOR 14 2010
7952789 MEMS devices with multi-component sacrificial layers 5 2010
* 2010/0165,442 MEMS DEVICES WITH MULTI-COMPONENT SACRIFICIAL LAYERS 4 2010
8284475 Methods of fabricating MEMS with spacers between plates and devices formed by same 1 2010
* 2010/0182,675 METHODS OF FABRICATING MEMS WITH SPACERS BETWEEN PLATES AND DEVICES FORMED BY SAME 7 2010
8298847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 6 2010
* 2010/0202,039 MEMS DEVICES HAVING SUPPORT STRUCTURES WITH SUBSTANTIALLY VERTICAL SIDEWALLS AND METHODS FOR FABRICATING THE SAME 9 2010
* 2010/0220,248 PROJECTION DISPLAY 22 2010
8164815 MEMS cavity-coating layers and methods 4 2010
* 2010/0245,979 MEMS CAVITY-COATING LAYERS AND METHODS 1 2010
7929197 System and method for a MEMS device 6 2010
8394656 Method of creating MEMS device cavities by a non-etching process 0 2010
8278726 Controlling electromechanical behavior of structures within a microelectromechanical systems device 6 2010
8928967 Method and device for modulating light 3 2010
8853747 Method of making an electronic device with a curved backplate 0 2010
* 2011/0053,304 METHOD OF MAKING AN ELECTRONIC DEVICE WITH A CURVED BACKPLATE 3 2010
8035884 Method and device for modulating light with semiconductor substrate 12 2010
* 2011/0080,632 METHOD OF MAKING A LIGHT MODULATING DISPLAY DEVICE AND ASSOCIATED TRANSISTOR CIRCUITRY AND STRUCTURES THEREOF 43 2010
* 2011/0043,891 METHOD FOR MODULATING LIGHT 8 2010
8358458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
* 2011/0051,224 LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED ADHESION IN MEMS DEVICES 0 2010
9110289 Device for modulating light with multiple electrodes 3 2011
* 2011/0170,167 METHOD FOR MODULATING LIGHT WITH MULTIPLE ELECTRODES 38 2011
* 2011/0170,166 DEVICE FOR MODULATING LIGHT WITH MULTIPLE ELECTRODES 36 2011
* 2011/0188,110 MICROELECTROMECHANICAL DEVICE WITH RESTORING ELECTRODE 42 2011
8971675 Interconnect structure for MEMS device 1 2011
9134527 Pixel via and methods of forming the same 1 2011
8963159 Pixel via and methods of forming the same 1 2011
8817357 Mechanical layer and methods of forming the same 2 2011
8659816 Mechanical layer and methods of making the same 0 2011
8682130 Method and device for packaging a substrate 0 2011
8964280 Method of manufacturing MEMS devices providing air gap control 1 2012
8970939 Method and device for multistate interferometric light modulation 0 2012
8638491 Device having a conductive light absorbing mask and method for fabricating same 3 2012
8878771 Method and system for reducing power consumption in a display 0 2012
8830557 Methods of fabricating MEMS with spacers between plates and devices formed by same 1 2012
9001412 Electromechanical device with optical function separated from mechanical and electrical function 1 2012
8791897 Method and system for writing data to MEMS display elements 0 2012
8885244 Display device 0 2013
9086564 Conductive bus structure for interferometric modulator array 1 2013
9097885 Device having a conductive light absorbing mask and method for fabricating same 1 2014
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (3)
* 6004832 Method of fabricating an electrostatic ultrasonic transducer 64 1997
7092138 Elastomer spatial light modulators for extreme ultraviolet lithography 2 2004
* 2005/0146,768 Elastomer spatial light modulators for extreme ultraviolet lithography 1 2004
 
QUALCOMM MEMS TECHNOLOGIES, INC. (3)
7738156 Display devices comprising of interferometric modulator and sensor 0 2007
8169687 Photonic MEMS and structures 0 2009
8681079 Interferometric optical modulator with broadband reflection characteristics 0 2011
 
IPG PHOTONICS CORPORATION (1)
* 5262000 Method for making micromechanical switch 117 1992
 
SILICON LIGHT MACHINES CORPORATION (48)
* 5841579 Flat diffraction grating light valve 186 1995
* 5808797 Method and apparatus for modulating a light beam 334 1996
* 5982553 Display device incorporating one-dimensional grating light-valve array 394 1997
* 6088102 Display apparatus including grating light-valve array and interferometric optical system 141 1997
6271808 Stereo head mounted display using a single display device 94 1998
* 6130770 Electron gun activated grating light valve 74 1998
* 6101036 Embossed diffraction grating alone and in combination with changeable image display 74 1998
6215579 Method and apparatus for modulating an incident light beam for forming a two-dimensional image 116 1998
6956878 Method and apparatus for reducing laser speckle using polarization averaging 36 2000
7177081 High contrast grating light valve type device 31 2001
6764875 Method of and apparatus for sealing an hermetic lid to a semiconductor die 34 2001
6865346 Fiber optic transceiver 6 2001
6747781 Method, apparatus, and diffuser for reducing laser speckle 68 2001
6707591 Angled illumination for a single order light modulator based projection system 4 2001
6639722 Stress tuned blazed grating light valve 8 2001
* 2003/0038,943 Method and apparatus for measuring wavelength jitter of light signal 5 2001
6800238 Method for domain patterning in low coercive field ferroelectrics 1 2002
6782205 Method and apparatus for dynamic equalization in wavelength division multiplexing 72 2002
6991953 Microelectronic mechanical system and methods 13 2002
6767751 Integrated driver process flow 7 2002
6728023 Optical device arrays with optimized image resolution 28 2002
7054515 Diffractive light modulator-based dynamic equalizer with integrated spectral monitor 1 2002
6822797 Light modulator structure for producing high-contrast operation using zero-order light 6 2002
6872984 Method of sealing a hermetic lid to a semiconductor die at an angle 27 2002
6829258 Rapidly tunable external cavity laser 36 2002
6908201 Micro-support structures 6 2002
6813059 Reduced formation of asperities in contact micro-structures 90 2002
6714337 Method and device for modulating a light beam and having an improved gamma response 8 2002
7057795 Micro-structures with individually addressable ribbon pairs 4 2002
6801354 2-D diffraction grating for substantially eliminating polarization dependent losses 10 2002
6956995 Optical communication arrangement 9 2002
6712480 Controlled curvature of stressed micro-structures 7 2002
7049164 Microelectronic mechanical system and methods 61 2002
6928207 Apparatus for selectively blocking WDM channels 3 2002
7057819 High contrast tilting ribbon blazed grating 6 2002
6987600 Arbitrary phase profile for better equalization in dynamic gain equalizer 2 2002
6934070 Chirped optical MEM device 6 2002
6927891 Tilt-able grating plane for improved crosstalk in 1×N blaze switches 3 2002
7068372 MEMS interferometer-based reconfigurable optical add-and-drop multiplexor 6 2003
7286764 Reconfigurable modulator-based optical add-and-drop multiplexer 4 2003
6947613 Wavelength selective switch and equalizer 1 2003
6922272 Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices 9 2003
7391973 Two-stage gain equalizer 2 2003
7027202 Silicon substrate as a light modulator sacrificial layer 55 2003
6922273 PDL mitigation structure for diffractive MEMS and gratings 2 2003
6829077 Diffractive light modulator with dynamically rotatable diffraction plane 4 2003
6806997 Patterned diffractive light modulator ribbon for PDL reduction 3 2003
7042611 Pre-deflected bias ribbons 0 2003
 
HONEYWELL INTERNATIONAL INC. (1)
* 2004/0145,741 Comb etalon fluid analyzer 7 2003
 
Digital Projection Limited (5)
* 5686939 Spatial light modulators 32 1993
* 6034660 Spatial light modulators 16 1996
* 6064366 Spatial light modulators 14 1997
6243057 Deformable mirror device driving circuit and method 5 1999
6184852 Spatial light modulators 11 1999
 
FSI INTERNATIONAL, INC. (1)
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RAMBUS DELAWARE LLC (16)
8272770 TIR switched flat panel display 12 2009
8152352 Optic system for light guide with controlled output 14 2009
7808697 TIR light valve 1 2009
* 2010/0172,138 Tir switched flat panel display 28 2009
* 2010/0085,773 Optic system light guide with controlled output 21 2009
8297818 Optical system with reflectors and light pipes 9 2009
8152318 Optical system for a light emitting diode with collection, conduction, phosphor directing, and output means 2 2009
* 2010/0315,836 Flat panel optical display system with highly controlled output 9 2009
8651724 TIR switched flat panel display 0 2009
8641257 Optic system for light guide with controlled output 0 2009
8395843 TIR light valve 0 2010
8733982 Internal collecting reflector optics for LEDs 0 2010
* 2011/0116,284 Internal Collecting Reflector Optics For LEDs 2 2010
8292445 Optical system for a light emitting diode with collection, conduction, phosphor directing, and output means 1 2012
8827531 Lighting assembly 1 2012
9291340 Lighting assembly having n-fold rotational symmetry 0 2014
 
VANDERBILT UNIVERSITY (2)
8498699 Method and nerve stimulator using simultaneous electrical and optical signals 5 2011
* 2011/0172,725 NERVE STIMULATOR AND METHOD USING SIMULTANEOUS ELECTRICAL AND OPTICAL SIGNALS 21 2011
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
* 5875008 Liquid crystal panel and projection display with use of liquid crystal panel 25 1997
* Cited By Examiner