US Patent No: 4,566,935

Number of patents in Portfolio can not be more than 2000

Spatial light modulator and method

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Abstract

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Methods of fabrication of spatial light modulators with deflectable beams by plasma etching after dicing of a substrate into chips, each of the chips an SLM, is disclosed. Also, various architectures available with such plasma etching process are disclosed and include metal cloverleafs for substrate addressing, metal flaps formed in a reflecting layer over a photoresist spacer layer, and torsion hinged flaps in a reflecting layer.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TEXAS INSTRUMENTS INCORPORATEDDALLAS, TX16406

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hornbeck, Larry J Van Alstyne, TX 35 12274

Cited Art Landscape

Patent Info (Count) # Cites Year
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
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Honeywell Inc. (1)
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* Cited By Examiner

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Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (6)
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SONY CORPORATION (1)
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TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (4)
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THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL (1)
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OCLARO TECHNOLOGY PLC (8)
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8,834,545 Optical-stimulation cochlear implant with electrode(s) at the apical end for electrical stimulation of apical spiral ganglion cells of the cochlea 1 2012
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Qualcomm Mems Technologies Co., Ltd. (1)
7,172,915 Optical-interference type display panel and method for making the same 83 2004
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (1)
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U.S. PHILIPS CORPORATION (1)
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CORNELL UNIVERSITY (1)
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AURA SYSTEMS, INC. (6)
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RAMBUS INTERNATIONAL LTD. (1)
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SUMITOMO ELECTRIC INDUSTRIES, LTD. (2)
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CORDATA INCORPORATED (1)
* 5,266,531 Dynamic holographic display with cantilever 6 1992
 
COLIBRYS SA (1)
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NATIONAL SEMICONDUCTOR CORPORATION (1)
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EVANS & SUTHERLAND COMPUTER CORPORATION (4)
7,891,818 System and method for aligning RGB light in a single modulator projector 6 2007
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INTEL CORPORATION (1)
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MICRONIC MYDATA AB (1)
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VENTURE LENDING & LEASING IV, INC. (21)
6,798,561 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 11 2003
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7,196,740 Projection TV with improved micromirror array 7 2004
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TEXAS INSTRUMENTS INCORPORATED (35)
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6,737,225 Method of undercutting micro-mechanical device with super-critical carbon dioxide 10 2001
6,951,769 Method for stripping sacrificial layer in MEMS assembly 10 2003
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6,806,993 Method for lubricating MEMS components 24 2003
7,362,493 Micromirror and post arrangements on substrates 3 2005
7,075,702 Micromirror and post arrangements on substrates 29 2005
* 2006/0018,003 Micromirror and post arrangements on substrates 0 2005
7,432,572 Method for stripping sacrificial layer in MEMS assembly 1 2005
7,403,324 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 2 2006
8,493,288 System and method for color-specific sequence scaling for sequential color systems 1 2006
7,737,989 System and method for computing color correction coefficients 6 2006
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8,305,391 System and method to generate multiprimary signals 1 2006
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7,751,114 System and apparatus for repairing micromirrors in spatial light modulators 0 2007
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8,693,082 Micromirror array assembly with in-array pillars 1 2010
* 2010/0302,618 Micromirror Array Assembly with In-Array Pillars 1 2010
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9,261,696 Micromirror array assembly 0 2014
 
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NP PHOTONICS, INC. (3)
6,665,109 Compliant mechanism and method of forming same 9 2002
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SEIKO EPSON CORPORATION (6)
* 5,999,306 Method of manufacturing spatial light modulator and electronic device employing it 131 1996
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6,271,955 Method of manufacturing spatial light modulator and electronic device employing it 17 2000
6,518,700 Organic light-emitting devices 90 2000
6,452,712 Method of manufacturing spatial light modulator and electronic device employing it 108 2001
6,650,461 Method of manufacturing spatial light modulator and electronic device employing it 41 2002
 
NITTO DENKO CORPORATION (1)
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6,423,239 Methods of making an etch mask and etching a substrate using said etch mask 4 2000
 
VENTURE LENDING & LEASING IV, INC. (47)
6,388,661 Monochrome and color digital display systems and methods 128 2000
6,356,378 Double substrate reflective spatial light modulator 279 2000
6,529,310 Deflectable spatial light modulator having superimposed hinge and deflectable element 71 2000
6,396,619 Deflectable spatial light modulator having stopping mechanisms 78 2000
6,523,961 Projection system and mirror elements for improved contrast ratio in spatial light modulators 107 2000
6,538,800 Reflective spatial light modulator with deflectable elements formed on a light transmissive substrate 48 2002
6,756,976 Monochrome and color digital display systems and methods for implementing the same 5 2002
6,690,502 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 5 2002
6,741,383 Deflectable micromirrors with stopping mechanisms 55 2002
7,099,065 Micromirrors with OFF-angle electrodes and stops 6 2003
* 2004/0141,224 DOUBLE SUBSTRATE REFLECTIVE SPATIAL LIGHT MODULATOR WITH SELF-LIMITING MICRO-MECHANICAL ELEMENTS 1 2003
6,999,224 Micromirror modulation method and digital apparatus with improved grayscale 14 2004
7,300,162 Projection display 5 2004
7,172,296 Projection display 9 2004
7,167,297 Micromirror array 4 2004
7,023,606 Micromirror array for projection TV 8 2004
7,018,052 Projection TV with improved micromirror array 5 2004
7,012,731 Packaged micromirror array for a projection display 4 2004
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* 2004/0223,240 Micromirror array 24 2004
* 2004/0218,293 Packaged micromirror array for a projection display 27 2004
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7,499,065 Asymmetrical switching delay compensation in display systems 9 2004
7,787,170 Micromirror array assembly with in-array pillars 32 2004
7,262,817 Rear projection TV with improved micromirror array 11 2004
7,436,572 Micromirrors and hinge structures for micromirror arrays in projection displays 3 2004
7,019,880 Micromirrors and hinge structures for micromirror arrays in projection displays 1 2004
6,980,349 Micromirrors with novel mirror plates 35 2004
7,113,322 Micromirror having offset addressing electrode 4 2004
6,947,200 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 175 2004
7,158,279 Spatial light modulators with non-uniform pixels 1 2004
7,092,143 Micromirror array device and a method for making the same 4 2004
7,215,458 Deflection mechanisms in micromirror devices 6 2004
7,023,607 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 9 2004
7,012,733 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 2 2004
7,375,873 Method of repairing micromirrors in spatial light modulators 3 2005
7,405,860 Spatial light modulators with light blocking/absorbing areas 3 2005
7,027,207 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 17 2005
7,009,754 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 108 2005
6,975,444 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 21 2005
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7,655,492 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 0 2005
7,573,111 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 4 2005
7,286,278 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates 4 2005
7,295,363 Optical coating on light transmissive substrates of micromirror devices 2 2005
 
MASSACHUSETTS EYE AND EAR INFIRMARY (1)
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ULTRATECH, INC. (2)
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RANK BRIMAR LIMITED A CORPORATION OF THE UNITED KINGDOM (1)
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6,987,599 Pattern generator mirror configurations 5 2003
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7,365,901 Pattern generator 2 2005
7,800,815 Pattern generator 0 2007
7,567,375 Hidden hinge MEMS device 1 2008
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7,787,174 Pattern generator 0 2009
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Miradia Inc. (46)
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7,026,695 Method and apparatus to reduce parasitic forces in electro-mechanical systems 8 2003
7,118,234 Reflective spatial light modulator 5 2004
7,092,140 Architecture of a reflective spatial light modulator 9 2004
7,022,245 Fabrication of a reflective spatial light modulator 11 2004
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7,449,284 Method and structure for fabricating mechanical mirror structures using backside alignment techniques 1 2004
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7,034,984 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge 34 2004
6,992,810 High fill ratio reflective spatial light modulator with hidden hinge 36 2004
7,042,619 Mirror structure with single crystal silicon cross-member 22 2004
7,068,417 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 26 2004
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7,206,110 Memory cell dual protection 4 2004
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7,172,921 Method and structure for forming an integrated spatial light modulator 5 2005
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7,199,918 Electrical contact method and structure for deflection devices formed in an array configuration 0 2005
7,142,349 Method and structure for reducing parasitic influences of deflection devices on spatial light modulators 2 2005
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7,298,539 Co-planar surface and torsion device mirror structure and method of manufacture for optical displays 1 2005
7,202,989 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate 2 2005
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7,190,508 Method and structure of patterning landing pad structures for spatial light modulators 1 2005
7,184,195 Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator 59 2005
7,502,158 Method and structure for high fill factor spatial light modulator with integrated spacer layer 0 2005
* 2006/0082,862 High fill ratio reflective spatial light modulator with hidden hinge 1 2005
7,369,297 Mirror structure with single crystal silicon cross-member 2 2005
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7,233,428 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 4 2006
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7,670,880 Method and structure for forming an integrated spatial light modulator 1 2007
7,382,519 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate 1 2007
7,570,416 Method and apparatus for a reflective spatial light modulator with a flexible pedestal 0 2007
* 2008/0055,709 METHOD AND APPARATUS FOR A REFLECTIVE SPATIAL LIGHT MODULATOR WITH A FLEXIBLE PEDESTAL 0 2007
7,428,094 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge 0 2007
* 2008/0062,503 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge 0 2007
8,207,004 Method and structure for forming a gyroscope and accelerometer 3 2009
* 2010/0109,102 Method and structure for forming a gyroscope and accelerometer 28 2009
8,530,259 Method and structure for forming a gyroscope and accelerometer 0 2012
 
THE TEXAS A&M UNIVERSITY SYSTEM (1)
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PDACO LTD. (1)
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REMBRANDT COMMUNICATIONS, LP (1)
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The United States of America as represented by the Secretary of the Air Force (1)
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KONINKLIJKE PHILIPS ELECTRONICS N.V. (1)
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QUALCOMM INCORPORATED (1)
7,709,964 Structure of a micro electro mechanical system and the manufacturing method thereof 8 2007
 
KENT STATE UNIVERSITY (2)
8,329,058 Chiral nematic photo displays 0 2007
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UDC, LLC (1)
7,499,208 Current mode display driver circuit realization feature 12 2005
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (3)
* 6,004,832 Method of fabricating an electrostatic ultrasonic transducer 63 1997
7,092,138 Elastomer spatial light modulators for extreme ultraviolet lithography 2 2004
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QUALCOMM MEMS TECHNOLOGIES, INC. (405)
7,123,216 Photonic MEMS and structures 610 1999
7,138,984 Directly laminated touch sensitive screen 133 2001
* 2002/0075,555 Interferometric modulation of radiation 460 2001
7,042,643 Interferometric modulation of radiation 218 2002
* 2002/0126,364 Interferometric modulation of radiation 61 2002
7,110,158 Photonic MEMS and structures 204 2002
7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 47 2002
* 2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 309 2002
7,297,471 Method for manufacturing an array of interferometric modulators 27 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 122 2003
* 2004/0263,944 Thin film precursor stack for MEMS manufacturing 31 2003
7,460,291 Separable modulator 70 2003
* 2004/0051,929 Separable modulator 52 2003
7,012,726 MEMS devices with unreleased thin film components 93 2003
7,198,973 Method for fabricating an interference display unit 118 2003
* 2004/0209,192 Method for fabricating an interference display unit 2 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 167 2003
7,692,844 Interferometric modulation of radiation 42 2004
7,532,194 Driver voltage adjuster 6 2004
* 2005/0168,431 Driver voltage adjuster 50 2004
7,119,945 Altering temporal response of microelectromechanical elements 154 2004
7,706,050 Integrated modulator illumination 42 2004
* 2005/0195,468 Integrated modulator illumination 77 2004
7,193,768 Interference display cell 25 2004
* 2005/0046,948 Interference display cell and fabrication method thereof 24 2004
* 2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 247 2004
* 2005/0036,095 Color-changeable pixels of an optical interference display panel 250 2004
7,476,327 Method of manufacture for microelectromechanical devices 55 2004
7,060,895 Modifying the electro-mechanical behavior of devices 65 2004
* 2005/0247,477 Modifying the electro-mechanical behavior of devices 18 2004
* 2005/0249,966 Method of manufacture for microelectromechanical devices 152 2004
7,280,265 Interferometric modulation of radiation 50 2004
7,164,520 Packaging for an interferometric modulator 53 2004
* 2005/0002,082 Interferometric modulation of radiation 59 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 57 2004
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7,855,824 Method and system for color optimization in a display 26 2005
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7,893,919 Display region architectures 21 2005
7,813,026 System and method of reducing color shift in a display 22 2005
* 2006/0077,514 System and method of reducing color shift in a display 15 2005
7,551,159 System and method of sensing actuation and release voltages of an interferometric modulator 19 2005
7,424,198 Method and device for packaging a substrate 5 2005
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7,142,346 System and method for addressing a MEMS display 45 2005
7,515,147 Staggered column drive circuit systems and methods 16 2005
* 2006/0044,246 Staggered column drive circuit systems and methods 85 2005
* 7,379,227 Method and device for modulating light 20 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 52 2005
7,289,259 Conductive bus structure for interferometric modulator array 83 2005
* 2006/0077,507 Conductive bus structure for interferometric modulator array 1 2005
* 2006/0077,510 System and method of illuminating interferometric modulators using backlighting 0 2005
* 2005/0244,949 Method and device for modulating light 24 2005
* 2006/0066,594 Systems and methods for driving a bi-stable display element 40 2005
7,460,246 Method and system for sensing light using interferometric elements 14 2005
* 2006/0066,876 Method and system for sensing light using interferometric elements 4 2005
7,560,299 Systems and methods of actuating MEMS display elements 27 2005
* 2006/0057,754 Systems and methods of actuating MEMS display elements 37 2005
7,012,732 Method and device for modulating light with a time-varying signal 85 2005
* 2005/0231,790 Method and device for modulating light with a time-varying signal 17 2005
7,359,066 Electro-optical measurement of hysteresis in interferometric modulators 9 2005
* 2006/0066,863 Electro-optical measurement of hysteresis in interferometric modulators 6 2005
7,701,631 Device having patterned spacers for backplates and method of making the same 5 2005
* 2006/0077,145 Device having patterned spacers for backplates and method of making the same 11 2005
7,259,449 Method and system for sealing a substrate 18 2005
* 2006/0065,622 Method and system for xenon fluoride etching with enhanced efficiency 5 2005
7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device 13 2005
7,668,415 Method and device for providing electronic circuitry on a backplate 9 2005
7,429,334 Methods of fabricating interferometric modulators by selectively removing a material 17 2005
7,420,728 Methods of fabricating interferometric modulators by selectively removing a material 19 2005
7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 11 2005
7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 9 2005
7,299,681 Method and system for detecting leak in electronic devices 3 2005
* 2006/0077,502 Methods of fabricating interferometric modulators by selectively removing a material 0 2005
* 2006/0067,642 Method and device for providing electronic circuitry on a backplate 9 2005
* 2006/0065,043 Method and system for detecting leak in electronic devices 1 2005
* 2006/0066,932 Method of selective etching using etch stop layer 70 2005
* 2005/0250,235 Controlling electromechanical behavior of structures within a microelectromechanical systems device 25 2005
7,920,135 Method and system for driving a bi-stable display 13 2005
7,679,627 Controller and driver features for bi-stable display 10 2005
7,586,484 Controller and driver features for bi-stable display 25 2005
7,535,466 System with server based control of client device display features 22 2005
7,532,195 Method and system for reducing power consumption in a display 10 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 65 2005
7,289,256 Electrical characterization of interferometric modulators 15 2005
* 2006/0077,523 Electrical characterization of interferometric modulators 7 2005
* 2006/0066,597 Method and system for reducing power consumption in a display 38 2005
* 2006/0066,504 System with server based control of client device display features 41 2005
* 2006/0067,643 System and method for multi-level brightness in interferometric modulation 1 2005
* 2006/0066,503 Controller and driver features for bi-stable display 38 2005
* 2006/0066,596 System and method of transmitting video data 30 2005
7,602,375 Method and system for writing data to MEMS display elements 8 2005
* 2006/0066,559 Method and system for writing data to MEMS display elements 33 2005
7,916,103 System and method for display device with end-of-life phenomena 2 2005
* 2006/0076,634 Method and system for packaging MEMS devices with incorporated getter 18 2005
7,321,456 Method and device for corner interferometric modulation 61 2005
* 2006/0077,515 Method and device for corner interferometric modulation 1 2005
7,626,581 Device and method for display memory using manipulation of mechanical response 8 2005
7,372,613 Method and device for multistate interferometric light modulation 91 2005
* 2006/0077,505 Device and method for display memory using manipulation of mechanical response 36 2005
* 2006/0077,508 Method and device for multistate interferometric light modulation 1 2005
7,889,163 Drive method for MEMS devices 26 2005
7,692,839 System and method of providing MEMS device with anti-stiction coating 3 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 67 2005
* 2006/0077,503 System and method of providing MEMS device with anti-stiction coating 30 2005
* 2006/0077,516 Device having a conductive light absorbing mask and method for fabricating same 2 2005
* 2006/0044,928 Drive method for MEMS devices 104 2005
7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge 5 2005
* 2006/0077,504 Method and device for protecting interferometric modulators from electrostatic discharge 6 2005
7,843,410 Method and device for electrically programmable display 6 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 57 2005
7,547,565 Method of manufacturing optical interference color display 21 2005
7,527,995 Method of making prestructure for MEMS systems 45 2005
* 2006/0177,950 Method of manufacturing optical interferance color display 16 2005
* 2006/0066,598 Method and device for electrically programmable display 67 2005
* 2006/0066,599 Reflective display pixels arranged in non-rectangular arrays 65 2005
7,808,703 System and method for implementation of interferometric modulator displays 6 2005
7,349,136 Method and device for a display having transparent components integrated therein 10 2005
* 2006/0077,393 System and method for implementation of interferometric modulator displays 14 2005
RE42119 Microelectrochemical systems device and method for fabricating same 14 2005
8,008,736 Analog interferometric modulator device 11 2005
7,710,629 System and method for display device with reinforcing substance 6 2005
* 2006/0066,600 System and method for display device with reinforcing substance 13 2005
8,124,434 Method and system for packaging a display 7 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 41 2005
7,471,444 Interferometric modulation of radiation 21 2005
7,388,706 Photonic MEMS and structures 29 2005
7,345,805 Interferometric modulator array with integrated MEMS electrical switches 25 2005
7,196,837 Area array modulation and lead reduction in interferometric modulators 48 2005
* 2006/0103,613 Interferometric modulator array with integrated MEMS electrical switches 12 2005
* 2006/0076,637 Method and system for packaging a display 12 2005
* 2006/0077,152 Device and method for manipulation of thermal response in a modulator 49 2005
* 2005/0286,114 Interferometric modulation of radiation 30 2005
* 2005/0286,113 Photonic MEMS and structures 30 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 84 2005
* 2006/0077,527 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 2 2005
8,004,504 Reduced capacitance display element 9 2005
7,553,684 Method of fabricating interferometric devices using lift-off processing techniques 7 2005
* 2006/0067,644 Method of fabricating interferometric devices using lift-off processing techniques 3 2005
7,417,783 Mirror and mirror layer for optical modulator and method 10 2005
7,373,026 MEMS device fabricated on a pre-patterned substrate 18 2005
7,343,080 System and method of testing humidity in a sealed MEMS device 10 2005
* 2006/0077,518 Mirror and mirror layer for optical modulator and method 5 2005
* 2006/0067,646 MEMS device fabricated on a pre-patterned substrate 0 2005
RE40436 Hermetic seal and method to create the same 14 2005
8,878,825 System and method for providing a variable refresh rate of an interferometric modulator display 0 2005
7,304,784 Reflective display device having viewable display on both sides 62 2005
* 2006/0077,155 Reflective display device having viewable display on both sides 14 2005
7,161,730 System and method for providing thermal compensation for an interferometric modulator display 94 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 46 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 14 2005
7,463,421 Method and device for modulating light 27 2005
* 2006/0077,156 MEMS device having deformable membrane characterized by mechanical persistence 71 2005
* 2006/0028,708 Method and device for modulating light 27 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 4 2005
7,310,179 Method and device for selective adjustment of hysteresis window 13 2005
* 2006/0077,521 System and method of implementation of interferometric modulators for display mirrors 6 2005
7,724,993 MEMS switches with deforming membranes 2 2005
7,492,502 Method of fabricating a free-standing microstructure 13 2005
7,417,735 Systems and methods for measuring color and contrast in specular reflective devices 57 2005
7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 23 2005
* 2006/0077,528 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 9 2005
* 2006/0067,648 MEMS switches with deforming membranes 39 2005
* 2006/0066,856 Systems and methods for measuring color and contrast in specular reflective devices 2 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 33 2005
* 2006/0067,649 Apparatus and method for reducing slippage between structures in an interferometric modulator 60 2005
7,136,213 Interferometric modulators having charge persistence 23 2005
* 2006/0066,542 Interferometric modulators having charge persistence 9 2005
7,564,612 Photonic MEMS and structures 91 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 237 2005
* 2006/0067,651 Photonic MEMS and structures 97 2005
* 2006/0067,650 Method of making a reflective display device using thin film transistor production techniques 17 2005
7,369,294 Ornamental display device 59 2005
7,710,636 Systems and methods using interferometric optical modulators and diffusers 30 2005
7,684,104 MEMS using filler material and method 17 2005
* 2006/0066,936 Interferometric optical modulator using filler material and method 65 2005
7,653,371 Selectable capacitance circuit 29 2005
* 2006/0077,617 Selectable capacitance circuit 22 2005
7,415,186 Methods for visually inspecting interferometric modulators for defects 6 2005
* 2006/0067,652 Methods for visually inspecting interferometric modulators for defects 4 2005
7,675,669 Method and system for driving interferometric modulators 5 2005
7,453,579 Measurement of the dynamic characteristics of interferometric modulators 13 2005
7,545,550 Systems and methods of actuating MEMS display elements 7 2005
* 2006/0066,560 Systems and methods of actuating MEMS display elements 61 2005
8,310,441 Method and system for writing data to MEMS display elements 1 2005
7,446,927 MEMS switch with set and latch electrodes 7 2005
* 2006/0066,937 MEMS SWITCH WITH SET AND LATCH ELECTRODES 41 2005
7,486,429 Method and device for multistate interferometric light modulation 17 2005
* 2006/0066,938 Method and device for multistate interferometric light modulation 55 2005
7,236,284 Photonic MEMS and structures 111 2005
7,630,114 Diffusion barrier layer for MEMS devices 8 2005
* 2007/0096,300 Diffusion barrier layer for MEMS devices 18 2005
8,014,059 System and method for charge control in a MEMS device 6 2005
7,776,631 MEMS device and method of forming a MEMS device 28 2005
* 2007/0058,095 System and method for charge control in a MEMS device 11 2005
7,618,831 Method of monitoring the manufacture of interferometric modulators 1 2005
7,403,323 Process control monitors for interferometric modulators 2 2005
7,369,252 Process control monitors for interferometric modulators 1 2005
7,259,865 Process control monitors for interferometric modulators 21 2005
* 2006/0077,381 Process control monitors for interferometric modulators 3 2005
* 2006/0066,872 Process control monitors for interferometric modulators 1 2005
8,391,630 System and method for power reduction when decompressing video streams for interferometric modulator displays 1 2005
* 2007/0147,688 System and method for power reduction when decompressing video streams for interferometric modulator displays 12 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 6 2005
7,355,779 Method and system for driving MEMS display elements 6 2006
* 2007/0053,652 Method and system for driving MEMS display elements 29 2006
7,916,980 Interconnect structure for MEMS device 10 2006
* 2007/0189,654 Interconnect structure for MEMS device 6 2006
7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 15 2006
* 2007/0170,540 Silicon-rich silicon nitrides as etch stops in MEMS manufature 3 2006
8,194,056 Method and system for writing data to MEMS display elements 2 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 3 2006
* 2007/0194,414 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 6 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 9 2006
* 2007/0196,944 Electrical conditioning of MEMS device and insulating layer thereof 9 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 46 2006
* 2007/0194,630 MEMS device having a layer movable at asymmetric rates 31 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 57 2006
* 2007/0206,267 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 9 2006
7,483,197 Photonic MEMS and structures 26 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 14 2006
7,532,377 Movable micro-electromechanical device 58 2006
7,643,203 Interferometric optical display system with broadband characteristics 34 2006
7,948,457 Systems and methods of actuating MEMS display elements 1 2006
* 2006/0250,350 Systems and methods of actuating MEMS display elements 22 2006
7,903,047 Mode indicator for interferometric modulator displays 4 2006
* 2007/0242,008 Mode indicator for interferometric modulator displays 32 2006
7,711,239 Microelectromechanical device and method utilizing nanoparticles 13 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 18 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 13 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 63 2006
* 2007/0249,079 Non-planar surface structures and process for microelectromechanical systems 17 2006
* 2007/0249,078 Non-planar surface structures and process for microelectromechanical systems 27 2006
8,049,713 Power consumption optimized display update 2 2006
7,920,136 System and method of driving a MEMS display device 1 2006
7,706,044 Optical interference display cell and method of making the same 11 2006
* 2006/0250,335 System and method of driving a MEMS display device 18 2006
7,880,954 Integrated modulator illumination 25 2006
7,369,292 Electrode and interconnect materials for MEMS devices 24 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 28 2006
* 2006/0209,384 System and method of illuminating interferometric modulators using backlighting 0 2006
* 2006/0198,013 Integrated modulator illumination 32 2006
8,174,469 Dynamic driver IC and display panel configuration 0 2006
* 2006/0279,495 Dynamic driver IC and display panel configuration 5 2006
7,848,001 Method and system for interferometric modulation in projection or peripheral devices 16 2006
7,907,319 Method and device for modulating light with optical compensation 34 2006
* 2006/0274,400 Method and device for modulating light with optical compensation 70 2006
7,161,094 Modifying the electro-mechanical behavior of devices 41 2006
* 2006/0219,435 Modifying the electro-mechanical behavior of devices 0 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 101 2006
* 2006/0274,074 Display device having a movable structure for modulating light and method thereof 2 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 31 2006
7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports 15 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 88 2006
* 2007/0279,753 Patterning of mechanical layer in MEMS to reduce stresses at supports 3 2006
7,187,489 Photonic MEMS and structures 105 2006
7,636,151 System and method for providing residual stress test structures 1 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 12 2006
* 2007/0290,961 Method and apparatus for low range bit depth enhancement for MEMS display architectures 3 2006
* 2007/0177,129 System and method for providing residual stress test structures 4 2006
7,702,192 Systems and methods for driving MEMS display 1 2006
7,835,061 Support structures for free-standing electromechanical devices 17 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 60 2006
* 2008/0055,707 Support structure for free-standing MEMS device and methods for forming the same 37 2006
7,777,715 Passive circuits for de-multiplexing display inputs 4 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 19 2006
7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 5 2006
* 2008/0003,737 Method of manufacturing MEMS devices providing air gap control 3 2006
* 2008/0002,210 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 0 2006
7,936,031 MEMS devices having support structures 11 2006
7,679,812 Support structure for MEMS device and methods therefor 45 2006
7,566,940 Electromechanical devices having overlying support structures 23 2006
7,534,640 Support structure for MEMS device and methods therefor 22 2006
* 2007/0047,900 MEMS devices having support structures and methods of fabricating the same 13 2006
* 2007/0019,922 Support structure for MEMS device and methods therefor 3 2006
7,830,586 Transparent thin films 33 2006
7,554,711 MEMS devices with stiction bumps 64 2006
* 2006/0262,380 MEMS devices with stiction bumps 91 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 9 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 47 2006
* 2008/0043,315 High profile contacts for microelectromechanical systems 7 2006
7,747,109 MEMS device having support structures configured to minimize stress-related deformation and methods for fabricating same 12 2006
7,704,773 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 11 2006
7,486,867 Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge 13 2006
* 2007/0042,524 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 25 2006
7,928,940 Drive method for MEMS devices 0 2006
* 2007/0024,550 Drive method for MEMS devices 4 2006
7,301,704 Moveable micro-electromechanical device 22 2006
* 2007/0008,607 Moveable micro-electromechanical device 0 2006
7,898,722 Microelectromechanical device with restoring electrode 51 2006
7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure 11 2006
* 2008/0094,686 Sacrificial spacer process and resultant structure for MEMS support structure 9 2006
7,619,810 Systems and methods of testing micro-electromechanical devices 8 2006
* 2008/0088,638 Systems and methods of testing micro-electromechanical devices 1 2006
7,388,697 System and method for addressing a MEMS display 16 2006
7,242,512 System and method for addressing a MEMS display 16 2006
* 2007/0035,804 System and method for addressing a MEMS display 0 2006
7,667,884 Interferometric modulators having charge persistence 6 2006
* 2007/0041,079 Interferometric modulators having charge persistence 2 2006
7,511,875 Moveable micro-electromechanical device 10 2006
8,284,474 Method and system for interferometric modulation in projection or peripheral devices 6 2007
7,872,792 Method and device for modulating light with multiple electrodes 25 2007
* 2007/0177,247 Method and device for modulating light with multiple electrodes 85 2007
7,846,344 Method and device for modulating light 7 2007
7,733,552 MEMS cavity-coating layers and methods 11 2007
* 2008/0231,931 MEMS CAVITY-COATING LAYERS AND METHODS 8 2007
8,059,326 Display devices comprising of interferometric modulator and sensor 15 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
* 2007/0253,054 DISPLAY DEVICES COMPRISING OF INTERFEROMETRIC MODULATOR AND SENSOR 75 2007
7,532,381 Method of making a light modulating display device and associated transistor circuitry and structures thereof 33 2007
* 2007/0229,936 METHOD OF MAKING A LIGHT MODULATING DISPLAY DEVICE AND ASSOCIATED TRANSISTOR CIRCUITRY AND STRUCTURES THEREOF 48 2007
7,569,488 Methods of making a MEMS device by monitoring a process parameter 44 2007
* 2008/0318,344 INDICATION OF THE END-POINT REACTION BETWEEN XeF2 AND MOLYBDENUM 2 2007
8,068,268 MEMS devices having improved uniformity and methods for making them 1 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 24 2007
* 2008/0026,328 METHOD FOR FABRICATING A STRUCTURE FOR A MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE 36 2007
7,723,015 Method for manufacturing an array of interferometeric modulators 18 2007
* 2007/0269,748 METHOD FOR MANUFACTURING AN ARRAY OF INTERFEROMETRIC MODULATORS 31 2007
8,081,369 System and method for a MEMS device 9 2007
7,852,545 Method and device for modulating light 30 2007
7,848,004 System and method for a MEMS device 17 2007
7,839,556 Method and device for modulating light 8 2007
7,830,587 Method and device for modulating light with semiconductor substrate 31 2007
7,826,120 Method and device for multi-color interferometric modulation 30 2007
7,808,694 Method and device for modulating light 31 2007
7,800,809 System and method for a MEMS device 8 2007
7,738,157 System and method for a MEMS device 36 2007
* 2008/0088,912 SYSTEM AND METHOD FOR A MEMS DEVICE 88 2007
* 2008/0088,910 SYSTEM AND METHOD FOR A MEMS DEVICE 95 2007
* 2008/0036,795 METHOD AND DEVICE FOR MODULATING LIGHT 5 2007
* 2008/0037,093 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 90 2007
8,072,402 Interferometric optical modulator with broadband reflection characteristics 12 2007
* 2009/0059,346 Interferometric Optical Modulator With Broadband Reflection Characteristics 26 2007
7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 8 2007
* 2008/0279,498 MEMS STRUCTURES, METHODS OF FABRICATING MEMS COMPONENTS ON SEPARATE SUBSTRATES AND ASSEMBLY OF SAME 40 2007
7,564,613 Microelectromechanical device and method utilizing a porous surface 16 2007
* 2008/0041,817 STRUCTURE OF A MICRO ELECTRO MECHANICAL SYSTEM AND THE MANUFACTURING METHOD THEREOF 17 2007
7,556,917 Method for manufacturing an array of interferometric modulators 21 2007
7,561,321 Process and structure for fabrication of MEMS device having isolated edge posts 40 2007
7,623,752 System and method of testing humidity in a sealed MEMS device 6 2008
7,570,865 System and method of testing humidity in a sealed MEMS device 2 2008
* 2008/0115,569 SYSTEM AND METHOD OF TESTING HUMIDITY IN A SEALED MEMS DEVICE 1 2008
* 2008/0115,596 SYSTEM AND METHOD OF TESTING HUMIDITY IN A SEALED MEMS DEVICE 0 2008
8,105,496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer 8 2008
8,040,588 System and method of illuminating interferometric modulators using backlighting 2 2008
* 2009/0225,394 SYSTEM AND METHOD OF ILLUMINATING INTERFEROMETRIC MODULATORS USING BACKLIGHTING 21 2008
8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 10 2008
8,115,988 System and method for micro-electromechanical operation of an interferometric modulator 6 2008
* 2009/0022,884 SYSTEM AND METHOD FOR MICRO-ELECTROMECHANICAL OPERATION OF AN INTERFEROMETRIC MODULATOR 17 2008
8,416,487 Photonic MEMS and structures 5 2009
8,169,687 Photonic MEMS and structures 0 2009
7,791,787 Moveable micro-electromechanical device 8 2009
* 2009/0135,463 MOVEABLE MICRO-ELECTROMECHANICAL DEVICE 1 2009
7,830,588 Method of making a light modulating display device and associated transistor circuitry and structures thereof 40 2009
7,864,403 Post-release adjustment of interferometric modulator reflectivity 3 2009
8,735,225 Method and system for packaging MEMS devices with glass seal 0 2009
8,368,124 Electromechanical devices having etch barrier layers 6 2009
* 2009/0323,168 ELECTROMECHANICAL DEVICES AND METHODS OF FABRICATING SAME 17 2009
7,875,485 Methods of fabricating MEMS devices having overlying support structures 13 2009
8,422,108 Method and device for modulating light with optical compensation 6 2009
8,736,590 Low voltage driver scheme for interferometric modulators 0 2010
7,835,093 Methods for forming layers within a MEMS device using liftoff processes 12 2010
* 2010/0200,938 METHODS FOR FORMING LAYERS WITHIN A MEMS DEVICE USING LIFTOFF PROCESSES 3 2010
8,218,229 Support structure for MEMS device and methods therefor 6 2010
8,149,497 Support structure for MEMS device and methods therefor 7 2010
* 2010/0147,790 SUPPORT STRUCTURE FOR MEMS DEVICE AND METHODS THEREFOR 13 2010
7,952,789 MEMS devices with multi-component sacrificial layers 5 2010
* 2010/0165,442 MEMS DEVICES WITH MULTI-COMPONENT SACRIFICIAL LAYERS 4 2010
8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same 1 2010
* 2010/0182,675 METHODS OF FABRICATING MEMS WITH SPACERS BETWEEN PLATES AND DEVICES FORMED BY SAME 7 2010
8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 6 2010
* 2010/0202,039 MEMS DEVICES HAVING SUPPORT STRUCTURES WITH SUBSTANTIALLY VERTICAL SIDEWALLS AND METHODS FOR FABRICATING THE SAME 8 2010
* 2010/0220,248 PROJECTION DISPLAY 22 2010
8,164,815 MEMS cavity-coating layers and methods 4 2010
* 2010/0245,979 MEMS CAVITY-COATING LAYERS AND METHODS 1 2010
7,929,197 System and method for a MEMS device 6 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,278,726 Controlling electromechanical behavior of structures within a microelectromechanical systems device 6 2010
8,928,967 Method and device for modulating light 0 2010
8,853,747 Method of making an electronic device with a curved backplate 0 2010
* 2011/0053,304 METHOD OF MAKING AN ELECTRONIC DEVICE WITH A CURVED BACKPLATE 3 2010
8,035,884 Method and device for modulating light with semiconductor substrate 12 2010
* 2011/0043,891 METHOD FOR MODULATING LIGHT 8 2010
8,358,458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
* 2011/0051,224 LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED ADHESION IN MEMS DEVICES 0 2010
9,110,289 Device for modulating light with multiple electrodes 0 2011
* 2011/0170,167 METHOD FOR MODULATING LIGHT WITH MULTIPLE ELECTRODES 38 2011
* 2011/0188,110 MICROELECTROMECHANICAL DEVICE WITH RESTORING ELECTRODE 42 2011
8,971,675 Interconnect structure for MEMS device 0 2011
9,134,527 Pixel via and methods of forming the same 0 2011
8,963,159 Pixel via and methods of forming the same 0 2011
8,817,357 Mechanical layer and methods of forming the same 1 2011
8,659,816 Mechanical layer and methods of making the same 0 2011
8,682,130 Method and device for packaging a substrate 0 2011
8,681,079 Interferometric optical modulator with broadband reflection characteristics 0 2011
8,964,280 Method of manufacturing MEMS devices providing air gap control 0 2012
8,970,939 Method and device for multistate interferometric light modulation 0 2012
8,638,491 Device having a conductive light absorbing mask and method for fabricating same 2 2012
8,878,771 Method and system for reducing power consumption in a display 0 2012
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012
9,001,412 Electromechanical device with optical function separated from mechanical and electrical function 0 2012
8,791,897 Method and system for writing data to MEMS display elements 0 2012
8,885,244 Display device 0 2013
9,086,564 Conductive bus structure for interferometric modulator array 0 2013
9,097,885 Device having a conductive light absorbing mask and method for fabricating same 0 2014
 
IPG PHOTONICS CORPORATION (1)
* 5,262,000 Method for making micromechanical switch 117 1992
 
SILICON LIGHT MACHINES CORPORATION (48)
* 5,841,579 Flat diffraction grating light valve 185 1995
* 5,808,797 Method and apparatus for modulating a light beam 332 1996
* 5,982,553 Display device incorporating one-dimensional grating light-valve array 380 1997
* 6,088,102 Display apparatus including grating light-valve array and interferometric optical system 141 1997
6,271,808 Stereo head mounted display using a single display device 85 1998
* 6,130,770 Electron gun activated grating light valve 73 1998
* 6,101,036 Embossed diffraction grating alone and in combination with changeable image display 71 1998
6,215,579 Method and apparatus for modulating an incident light beam for forming a two-dimensional image 115 1998
6,956,878 Method and apparatus for reducing laser speckle using polarization averaging 34 2000
7,177,081 High contrast grating light valve type device 30 2001
6,764,875 Method of and apparatus for sealing an hermetic lid to a semiconductor die 31 2001
6,865,346 Fiber optic transceiver 5 2001
6,747,781 Method, apparatus, and diffuser for reducing laser speckle 66 2001
6,707,591 Angled illumination for a single order light modulator based projection system 4 2001
6,639,722 Stress tuned blazed grating light valve 8 2001
* 2003/0038,943 Method and apparatus for measuring wavelength jitter of light signal 5 2001
6,800,238 Method for domain patterning in low coercive field ferroelectrics 1 2002
6,782,205 Method and apparatus for dynamic equalization in wavelength division multiplexing 68 2002
6,991,953 Microelectronic mechanical system and methods 10 2002
6,767,751 Integrated driver process flow 6 2002
6,728,023 Optical device arrays with optimized image resolution 26 2002
7,054,515 Diffractive light modulator-based dynamic equalizer with integrated spectral monitor 1 2002
6,822,797 Light modulator structure for producing high-contrast operation using zero-order light 6 2002
6,872,984 Method of sealing a hermetic lid to a semiconductor die at an angle 27 2002
6,829,258 Rapidly tunable external cavity laser 36 2002
6,908,201 Micro-support structures 6 2002
6,813,059 Reduced formation of asperities in contact micro-structures 90 2002
6,714,337 Method and device for modulating a light beam and having an improved gamma response 8 2002
7,057,795 Micro-structures with individually addressable ribbon pairs 4 2002
6,801,354 2-D diffraction grating for substantially eliminating polarization dependent losses 10 2002
6,956,995 Optical communication arrangement 8 2002
6,712,480 Controlled curvature of stressed micro-structures 7 2002
7,049,164 Microelectronic mechanical system and methods 60 2002
6,928,207 Apparatus for selectively blocking WDM channels 3 2002
7,057,819 High contrast tilting ribbon blazed grating 5 2002
6,987,600 Arbitrary phase profile for better equalization in dynamic gain equalizer 2 2002
6,934,070 Chirped optical MEM device 6 2002
6,927,891 Tilt-able grating plane for improved crosstalk in 1×N blaze switches 3 2002
7,068,372 MEMS interferometer-based reconfigurable optical add-and-drop multiplexor 6 2003
7,286,764 Reconfigurable modulator-based optical add-and-drop multiplexer 4 2003
6,947,613 Wavelength selective switch and equalizer 1 2003
6,922,272 Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices 9 2003
7,391,973 Two-stage gain equalizer 2 2003
7,027,202 Silicon substrate as a light modulator sacrificial layer 55 2003
6,922,273 PDL mitigation structure for diffractive MEMS and gratings 2 2003
6,829,077 Diffractive light modulator with dynamically rotatable diffraction plane 4 2003
6,806,997 Patterned diffractive light modulator ribbon for PDL reduction 3 2003
7,042,611 Pre-deflected bias ribbons 0 2003
 
HONEYWELL INTERNATIONAL INC. (1)
* 2004/0145,741 Comb etalon fluid analyzer 6 2003
 
DIGITAL PROJECTION LIMITED (5)
* 5,686,939 Spatial light modulators 32 1993
* 6,034,660 Spatial light modulators 16 1996
* 6,064,366 Spatial light modulators 14 1997
6,243,057 Deformable mirror device driving circuit and method 5 1999
6,184,852 Spatial light modulators 11 1999
 
FSI INTERNATIONAL, INC. (1)
* RE36006 Metal selective polymer removal 2 1996
 
RAMBUS DELAWARE LLC (16)
8,272,770 TIR switched flat panel display 6 2009
8,152,352 Optic system for light guide with controlled output 8 2009
7,808,697 TIR light valve 1 2009
* 2010/0172,138 Tir switched flat panel display 15 2009
* 2010/0085,773 Optic system light guide with controlled output 18 2009
8,297,818 Optical system with reflectors and light pipes 3 2009
8,152,318 Optical system for a light emitting diode with collection, conduction, phosphor directing, and output means 0 2009
* 2010/0315,836 Flat panel optical display system with highly controlled output 9 2009
8,651,724 TIR switched flat panel display 0 2009
8,641,257 Optic system for light guide with controlled output 0 2009
8,395,843 TIR light valve 0 2010
8,733,982 Internal collecting reflector optics for LEDs 0 2010
* 2011/0116,284 Internal Collecting Reflector Optics For LEDs 1 2010
8,292,445 Optical system for a light emitting diode with collection, conduction, phosphor directing, and output means 1 2012
8,827,531 Lighting assembly 1 2012
9,291,340 Lighting assembly having n-fold rotational symmetry 0 2014
 
VANDERBILT UNIVERSITY (2)
8,498,699 Method and nerve stimulator using simultaneous electrical and optical signals 3 2011
* 2011/0172,725 NERVE STIMULATOR AND METHOD USING SIMULTANEOUS ELECTRICAL AND OPTICAL SIGNALS 21 2011
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
* 5,875,008 Liquid crystal panel and projection display with use of liquid crystal panel 24 1997
* Cited By Examiner