Modular V-CVD diffusion furnace
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United States of America Patent
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-
Mar 4, 1986
Issued Date -
N/A
app pub date -
Jul 22, 1985
filing date -
Nov 16, 1983
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A novel modular V-CVD diffusion furnace includes a cylindrical quartz diffusion tube having integral end flanges, a first metallic sealing plate having gas ports removably fastened to one flange, a second metallic sealing plate having a plurality of precisely aligned gas injection tube receiving apertures removably fastened to the other flange, a like plurality of gas injection tubes slidably mounted in and sealed to corresponding gas injection tube receiving apertures, and a cylindrical quartz liner slidably mounted in the cylindrical diffusion tube.
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