Method and apparatus for radiation testing of electron devices
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 11, 1986
Grant Date -
N/A
app pub date -
Apr 4, 1983
filing date -
Apr 4, 1983
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A test apparatus for electron devices, such as integrated circuits, at the wafer stage of fabrication, wherein a beam of ionizing radiation is directed through an electrical probe card and onto the wafer under test. The probe card and the radiation beam share a common port through which a selected device or group of devices is exposed, but other devices on the wafer are not similarly exposed. A microscope, supported on a frame, is interchangeable with the radiation beam source, sharing the common port, so that a tested device may be observed.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully