Method of manufacturing a device with micro-shutters and application of such a method to obtain a light modulating device
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United States of America Patent
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Apr 22, 1986
Grant Date -
N/A
app pub date -
Nov 13, 1984
filing date -
Nov 18, 1983
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method for manufacturing a device with micro-shutters, e.g., a light modulating device, includes the following steps: producing a first grid presenting cells; providing a plane support by depositing a layer of organic material on the grid filling the cells; producing a second grid on the layer of organic material; depositing a fine metallic layer on the second grid; cutting shutters and shutter attachments in the fine metallic layer; and removing the organic material layer in the cells to free the shutters.
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