Porous ceramic thin film and process for preparing the same
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United States of America Patent
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Apr 22, 1986
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N/A
app pub date -
May 11, 1984
filing date -
May 13, 1983
priority date (Note) -
Expired
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Abstract
A process for preparing a porous ceramic thin film which comprises applying an anhydrous solution containing an organometallic compound and a multifunctional organic compound to a substrate, and thermally decomposing the compounds. The porous ceramic thin film prepared by the process has pores of not more than 10 .mu.m in pore size, and is useable as for materials of various sensors.
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