Method of and apparatus for real-time high-speed inspection of objects for identifying or recognizing known and unknown portions thereof, including defects and the like

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United States of America Patent

PATENT NO 4589140
SERIAL NO

06477264

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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This disclosure is concerned with real-time high-speed inspection of objects involving storing digital signal mask information of optical scans of objects at different magnifications, but with substantially the same field of view, and comparing digital mask information obtained by run scans of objects-to-be-inspected, at different magnifications, with the stored mask information to identify known or unknown portions of the objects, with adaptability for rapid 'teaching' of large sets of objects for storage and subsequent comparison with real objects under inspection.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION A CORP OF JAPAN2-3 MARUNOUCHI 3-CHOME CHIYODA-KU TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bishop, Robert Brookline, MA 42 738
Schwenke, Derek Lexington, MA 1 113

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