Device for holding a substrate
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United States of America Patent
Stats
-
May 20, 1986
Grant Date -
N/A
app pub date -
Mar 20, 1985
filing date -
Mar 27, 1984
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A device for holding one or more substrates, each of substantially circular profile, especially in vacuum coating apparatus. In a vertical plate there is provided an opening on whose edge holding means are provided into which each substrate is fitted. In accordance with the invention, the opening has in its bottom area an approximately semicircular radial groove which is defined on both sides by semicircular rims. In its upper portion the opening has on one side a lip which merges with one of the rims in the lower part of the opening. On the other side there is disposed a counterbore offset eccentrically upward from the opening, whose radius is at least as great as the radius of the groove bottom. In this manner an insertion opening is formed on one side of the plate for the eccentric insertion of the substrate.
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