Laser-recrystallized diaphragm pressure sensor and method of making
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United States of America Patent
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-
Jun 3, 1986
Grant Date -
N/A
app pub date -
Apr 15, 1985
filing date -
Apr 15, 1985
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A pressure sensor includes a diaphragm and an overpressure stop, with a gap inbetween for displacement of the diaphragm in response to an applied pressure, the diaphragm being formed of laser-recrystallized polysilicon. Data extraction is accomplished either by depositing or forming four piezoresistors on the diaphragm and connecting them as the elements of a Wheatstone bridge circuit or by using the appropriately doped laser-recrystallized diaphragm as a piezoresistor itself.
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Cited Art Landscape
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