Plasma-deposited capacitor dielectrics

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 4599678
SERIAL NO

06713638

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Abstract

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A plasma-deposited silicon compound thin film dielectric for use in a thin film capacitor. The film is produced in a high frequency glow discharge with a substrate heated to a temperature in excess of 50.degree. C. A thin film capacitor using such a film has a lower dissipation factor and a reduced tendency to age.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
POLYPLASMA INC.MONTREAL PROVINCE OF QUEBEC0

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ramu, Tyamagondlu S No. 172, 2nd Main, 3rd Cross, "Srividya", Mahalaxmi Layout, Bangalore 560086, IN 1 25
Wertheimer, Michael R 91 Sommerville Ave., Westmount, Quebec, CA 7 151

Cited Art Landscape

Patent Info (Count) # Cites Year
 
Toray Silicone Company, Ltd. (1)
* 4431701 Silicone rubber covered electrical conductor 10 1981
 
KUREHA KAGAKU KOGYO KABUSHIKI KAISHA (AKA KUREHA CHEMICAL INDUSTRY COMPANY, LIMITED) (1)
* 4543294 Polymer dielectric comprising copolymer of vinylidene fluoride, tetrafluoroethylene and ethylene 15 1984
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
POLARIS INNOVATIONS LIMITED (2)
7202547 Capacitor with a dielectric including a self-organized monolayer of an organic compound 6 2005
* 2005/0167,660 Capacitor with a dielectric including a self-organized monolayer of an organic compound 2 2005
 
U.S. PHILIPS CORPORATION (1)
* 4786887 Thin-film strain gauge system and method of manufacturing same 16 1987
 
Ultrasource, Inc. (11)
6761963 Integrated thin film capacitor/inductor/interconnect system and method 21 2001
6998696 Integrated thin film capacitor/inductor/interconnect system and method 8 2003
6890629 Integrated thin film capacitor/inductor/interconnect system and method 10 2003
* 2004/0081,811 Integrated thin film capacitor/inductor/interconnect system and method 15 2003
* 2004/0080,021 Integrated thin film capacitor/inductor/interconnect system and method 15 2003
7327582 Integrated thin film capacitor/inductor/interconnect system and method 6 2005
* 2005/0175,938 Integrated thin film capacitor/inductor/interconnect system and method 3 2005
7425877 Lange coupler system and method 1 2005
* 2005/0162,236 Lange coupler system and method 2 2005
7446388 Integrated thin film capacitor/inductor/interconnect system and method 6 2005
* 2006/0097,344 Integrated thin film capacitor/inductor/interconnect system and method 0 2005
 
GENERAL VACUUM EQUIPMENT LIMITED, NOW KNOWN AS VALMET GENERAL LIMITED BY CHANGE OF NAME (3)
* 5224441 Apparatus for rapid plasma treatments and method 108 1991
* 5364665 Method for rapid plasma treatments 26 1993
* 5904952 Method of plasma enhanced silicon oxide deposition 28 1997
 
SUMITOMO ELECTRIC INDUSTRIES, LTD. (1)
* 5245505 Capacitor element 20 1992
 
POLYPLASMA INC. (1)
* 5424131 Barrier coatings on spacecraft materials 9 1993
 
BECTON, DICKINSON AND COMPANY (3)
* 5364666 Process for barrier coating of plastic objects 66 1993
* 5824198 Process for barrier coating of plastic objects 15 1994
* 5616369 Process for barrier coating of plastic objects 68 1994
 
APTINA IMAGING CORPORATION (9)
7094657 Method for protecting against oxidation of a conductive layer in said device 0 2000
7067861 Device and method for protecting against oxidation of a conductive layer in said device 0 2000
7041550 Device and method for protecting against oxidation of a conductive layer in said device 0 2000
* 6924188 Device and method for protecting against oxidation of a conductive layer in said device 0 2000
6916699 Device and method for protecting against oxidation of a conductive layer in said device 5 2000
6852622 Device and method for protecting against oxidation of a conductive layer in said device 0 2000
6808976 Device and method for protecting against oxidation of a conductive layer in said device 2 2000
6897512 Device and method for protecting against oxidation of a conductive layer in said device 0 2001
6972452 Device and method for protecting against oxidation of a conductive layer in said device 0 2004
 
UNITED TECHNOLOGIES CORPORATION (1)
* 2009/0178,618 MULTILAYERED BORON NITRIDE/SILICON NITRIDE FIBER COATINGS 2 2009
* Cited By Examiner