Apparatus for heating and cooling articles
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United States of America Patent
Stats
-
Sep 2, 1986
Grant Date -
N/A
app pub date -
Oct 9, 1985
filing date -
Oct 9, 1985
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A first thermally conductive plate holds an article and heats the article with heating elements in the plate. Parallel rails support the first plate above a base. Cooling passageways for coolant flow are in a second thermally conductive plate. The second plate is supported spaced from the base by a shaft in a chamber of the second plate and a spring. During the heating phase, the second plate is spaced apart from the first plate. During the cooling phase, the second plate is urged by the spring into contact with the first plate, so that the second plate acts as a heat sink for the first plate. Vacuum suction and an annular elastomer seal around the top rim of the second plate clamp the first and second plates together in thermal communication. Vacuum suction in the chamber retracts the second plate from the first plate.
First Claim
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Patent Owner(s)
| Patent Owner | Address | |
|---|---|---|
| TENCOR INSTRUMENTS 2400 CHARLESTON ROAD MOUNTAIN VIEW 94303 A CORP OF CA | CA |
International Classification(s)
Inventor(s)
| Inventor Name | Address | # of filed Patents | Total Citations |
|---|---|---|---|
| Lee, Steven R | Mountain View, CA | 1 | 40 |
| Wheeler, William R | Saratoga, CA | 71 | 1651 |
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| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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