Apparatus for heating and cooling articles

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 4609037
SERIAL NO

06786231

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A first thermally conductive plate holds an article and heats the article with heating elements in the plate. Parallel rails support the first plate above a base. Cooling passageways for coolant flow are in a second thermally conductive plate. The second plate is supported spaced from the base by a shaft in a chamber of the second plate and a spring. During the heating phase, the second plate is spaced apart from the first plate. During the cooling phase, the second plate is urged by the spring into contact with the first plate, so that the second plate acts as a heat sink for the first plate. Vacuum suction and an annular elastomer seal around the top rim of the second plate clamp the first and second plates together in thermal communication. Vacuum suction in the chamber retracts the second plate from the first plate.

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Patent Owner(s)

Patent OwnerAddress
TENCOR INSTRUMENTS 2400 CHARLESTON ROAD MOUNTAIN VIEW 94303 A CORP OF CACA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Steven R Mountain View, CA 1 40
Wheeler, William R Saratoga, CA 71 1651

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