Electrically isolated semiconductor integrated photodiode circuits and method
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United States of America Patent
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Sep 16, 1986
Grant Date -
N/A
app pub date -
Oct 22, 1984
filing date -
Oct 22, 1984
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An interconnected array of solar cell or photodiode devices is formed by a method which includes the steps of forming on one major surface of a semiconductor wafer a plurality of said devices, forming grooves in said one major surface extending partway into said substrate between adjacent said devices, forming an oxide layer on selected portions of said one major surface and on the surfaces of said grooves, filling the grooves with an insulating material, forming metal interconnects between adjacent devices extending over said grooves and insulating material, attaching said one major surface to an insulating support, and severing through the wafer into the grooves from the other major surface to separate adjacent devices while leaving the metal interconnects.
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