Stripping composition and method of using the same
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United States of America Patent
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Oct 14, 1986
Grant Date -
N/A
app pub date -
Apr 11, 1985
filing date -
Apr 11, 1985
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Disclosed is a stripping composition for effectively removing an organic polymeric material from a substrate. The stripping composition is essentially free of phenol compounds and halogenated hydrocarbon compounds and contains a select amine compound and an organic polar solvent. It has been found that the stripping composition is highly effective, even when the organic polymeric material to be removed from a substrate is a positive resist which has been subjected to high temperature post-baking operations.
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