Illumination optical arrangement

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United States of America Patent

PATENT NO 4619508
SERIAL NO

06726232

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An illumination optical arrangement comprises light source means emitting a coherent light beam, and means for forming a substantially incoherent light source from the coherent light beam. The incoherent light source forming means includes means for periodically deflecting the coherent light beam and scanning a predetermined scanning area by the coherent light beam, and optical means for forming a plurality of optical paths for directing the coherent light beam passed through the predetermined scanning area to a plurality of different secondary scanning areas. Each of the plurality of secondary scanning areas is scanned by the periodically deflected coherent light beam.

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Patent Owner(s)

  • NIKON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Shibuya, Masato Ohmiya, JP 43 937
Uehara, Makoto Tokyo, JP 40 1679

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