Device for the projection copying of masks
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 28, 1986
Grant Date -
N/A
app pub date -
Oct 2, 1984
filing date -
Jan 23, 1984
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
To adjust a device for the projection copying of masks on a semiconductor substrate, adjustment marks are illuminated with wideband adjustment light in order to eliminate variations in the intensity of the reflected signal in the area of a mark field. The color defect created by the wideband nature of the ajustment light is determined by spectroscopic means and taken into account when making the adjustment.
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Cited Art Landscape
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