Manufacture of integrated optical waveguides
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United States of America Patent
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Oct 28, 1986
Grant Date -
N/A
app pub date -
Jun 7, 1985
filing date -
Jun 11, 1984
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Integrated optical waveguides, for example planar waveguides with stripes of guiding material formed integrally on a substrate, are manufactured by depositing the doped glass guiding material by plasma chemical vapor deposition. Several substrates can be arranged in a suitably shaped apparatus so that deposition can take place on all of them at once.
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