Data handling system for a pattern generator

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United States of America Patent

PATENT NO 4620288
SERIAL NO

06545650

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Abstract

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This data processing system for a pattern generator receives data specifying each quadrilateral element in a pattern to be generated by laser scanning or other technique. The scanning is accomplished by swaths. In the preprocessor, separate vectors are produced for the portion of each quadrilateral edge in each swath. A real time processor, including a 'pipeline' or cascaded set of beam processors, is used to generate a bit map from these clipped edge vectors. The bit map itself is skew compensated to take into account relative movement between the laser scanner and the target during pattern generation.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Welmers, Thomas E Reseda, CA 2 68

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