Method and system for a vacuum evaporative deposition process

United States of America Patent

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Dec 9, 1986
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N/A
app pub date
Aug 8, 1984
filing date
Aug 20, 1983

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Expired

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Abstract

A method and system for a vacuum-evaporative film-deposition process displays bar charts of the local evaporation power of each vapor source in the process and the film thickness deposited thereby in spatial coordination on a single display screen.

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Patent Owner(s)

Patent Owner	Address
LEYBOLD AKTIENGESELLSCHAFT	WILHELM-ROHN-STR 25 D-6450 HANAU

International Classification(s)

C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Feuerstein, Albert	Neuberg, DE	32	511
Ranke, Horst	Filderstadt, DE	10	169
Thorn, Gernot	Hanau am Main, DE	12	169

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Method and system for a vacuum evaporative deposition process

Number of patents in Portfolio can not be more than 2000

United States of America Patent

06639363

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PATENT NO	4627989
SERIAL NO	06639363
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06639363

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