Positioning device comprising pre-stressed contactless bearings
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United States of America Patent
Stats
-
Dec 9, 1986
Grant Date -
N/A
app pub date -
Jun 5, 1985
filing date -
Mar 29, 1985
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A positioning device having a plate-shaped carrier (5) which is displaceable in a horizontal plane and which is journalled on a table (1) and on which is exerted a pressure and tensile force, respectively, by means of at least two translation drives (11, 13). The translation drives (11, 13) are coupled to the carrier (5) by means of horizontally operating static thrust and tensile bearings, respectively (33 to 41, 49), which transfer via a viscous medium in a contactless manner pressure and tensile forces respectively, between the carrier (5) and the translation drives (11, 13). The contactless bearings (33 to 41, 49) are pre-stressed with a force which is larger than the maximum occurring tensile force between the drives (11, 13) and the carrier (5). Thus, a substantially frictionless coupling is obtained between the drives (11, 13) and the carrier (5). This coupling acts at the same time as a guide for the carrier (5).
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