Capacitive detector for absolute pressure
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United States of America Patent
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-
Dec 9, 1986
Grant Date -
N/A
app pub date -
Feb 15, 1985
filing date -
Feb 21, 1984
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A capacitive detector for absolute pressure, which comprises a base and a stationary capacitor plate (7) attached onto the base (3). An aneroid capsule (4) is arranged in connection with the base (3) and provided with a mobile capacitor plate area (5, 6) directed towards the base (3) and changing its distance from the stationary capacitor plate (7) by the effect of pressure. A silicon plate (2) is attached onto the base and has membrane-like middle portion (5, 6) acting as a mobile capacitor plate. A plate structure (1) is attached hermetically onto the silicon plate (2) such that the space of the aneroid capsule (4) is located between the plate structure (1) and the silicon plate (2).
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