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Abstract

A radio frequency excitor apparatus and method produce an inductively coupled plasma to heat an analytic sample. The apparatus includes a radio frequency generator mechanism for producing electrical power of selected radio frequency. The generator mechanism has a power output tuning mechanism comprised of at least one output tuning inductor for determining the generator radio frequency. A separate plasma load circuit is coupled to the generator mechanism and is comprised of a work coil and a series connected, impedance matching capacitor. The work coil is adapted to produce an inductively coupled plasma and the capacitor is adapted to substantially balance the combined inductive reactances of the work coil and plasma. A control mechanism for controlling the power input into the plasma load circuit stabilizes the plasma.

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First Claim