Thin film capacitors and method of making the same

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United States of America Patent

PATENT NO 4631633
SERIAL NO

06812158

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A thin film capacitor is formed of a thin crystalline electrically insulative or semiconductive substrate. With the insulative substrate a thin conductive metal layer is deposited on the substrate and a thin film of a crystalline strontium barium niobate deposited on the thin conductive metal layer so that its 2.77.ANG. spaced atomic planes are oriented in a non-perpendicular manner to the substrate and an additional thin conductive layer is deposited on the surface of the strontium barium niobate film. When a semiconductive substrate is employed the strontium barium niobate film is deposited directly on the substrate. These capacitors exhibit a low temperature coefficient of capacitance and a high capacitance density.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
North American Philips CorporationNEW YORK, NY44

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Frommer, Myron H Monsey, NY 4 73
Lukasik, Stanley J Hawthorn, NY 1 14
Shaulov, Avner A Monsey, NY 6 64
Zwicker, Walter K Scarborough, NY 5 52

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Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
* 5383088 Storage capacitor with a conducting oxide electrode for metal-oxide dielectrics 52 1993
 
NEC CORPORATION (1)
* 5262920 Thin film capacitor 45 1992
 
Cerberus AG (1)
* 4940897 Novel pyroelectric detector 4 1989
 
Ultrasource, Inc. (11)
6761963 Integrated thin film capacitor/inductor/interconnect system and method 21 2001
6998696 Integrated thin film capacitor/inductor/interconnect system and method 8 2003
6890629 Integrated thin film capacitor/inductor/interconnect system and method 10 2003
* 2004/0081,811 Integrated thin film capacitor/inductor/interconnect system and method 15 2003
* 2004/0080,021 Integrated thin film capacitor/inductor/interconnect system and method 15 2003
7327582 Integrated thin film capacitor/inductor/interconnect system and method 6 2005
* 2005/0175,938 Integrated thin film capacitor/inductor/interconnect system and method 3 2005
7425877 Lange coupler system and method 1 2005
* 2005/0162,236 Lange coupler system and method 2 2005
7446388 Integrated thin film capacitor/inductor/interconnect system and method 6 2005
* 2006/0097,344 Integrated thin film capacitor/inductor/interconnect system and method 0 2005
 
INTERMOLECULAR, INC. (2)
* 8813325 Method for fabricating a DRAM capacitor 0 2011
* 2012/0262,835 METHOD FOR FABRICATING A DRAM CAPACITOR 5 2011
 
SAMSUNG ELECTRONICS CO., LTD. (1)
* 5124777 Dielectric medium for capacitor of semiconductor device 84 1991
 
AMP Incorporated (1)
* 4853659 Planar pi-network filter assembly having capacitors formed on opposing surfaces of an inductive member 20 1988
 
FUJITSU LIMITED (2)
* 8474126 Manufacturing method of semiconductor device 0 2011
* 2011/0294,265 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME 3 2011
 
Allied-Signal Inc. (1)
* 4733328 Process for manufacturing capacitive devices and capacitive devices manufactured by the process 74 1986
* Cited By Examiner