Method and apparatus for particle irradiation of a target
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United States of America Patent
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-
Dec 30, 1986
Grant Date -
N/A
app pub date -
May 31, 1984
filing date -
Jul 1, 1983
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Method and apparatus for particle irradiation of a target, wherein the anisotropic contrast deflection of an irradiation modulator for producing the exposure pattern is produced step by step, the magnitude of the potential difference between the electrodes of a comb electrode is being set, and the structuring of a line probe is controlled by a control logic according to given specifications by utilization of potential setting patterns.
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