Importance

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Abstract

An electron beam drawing control system has a first memory which stores parameters specifying figures representing a pattern to be drawn in a number of cells. A figure generating device reads out parameters representing each figure sequentially from the first memory and generates dot pattern data corresponding to the figures. A second memory stores dot pattern data generated by the figure generating device. A read control device transforms dot pattern data stored in the second memory into serial form and supplies the serial data to an electro-optical device. The figure generating device includes a plurality of dot pattern converting devices. Also, the dot pattern data for each cell as generated by the dot pattern data converting units are stored in separate cell memories of the second memory.

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First Claim