Method and apparatus for surface profilometry

United States of America Patent

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Feb 10, 1987
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N/A
app pub date
Sep 14, 1984
filing date
Sep 14, 1984

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Expired

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Abstract

Phase measurements of deformed grating images are used in performing improved optical profilometry. In one embodiment, phase differences between images of an object and a reference plane are used to obtain a measure of the object height.

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Patent Owner(s)

Patent Owner	Address
NEW YORK INSTITUTE OF TECHNOLOGY A NY CORP	WHEATLEY ROAD OLD WESTBURY NY 11565

International Classification(s)

G01B:MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIME....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Halioua, Maurice	Sea Cliff, NY	7	374
Srinivasan, Venugopal	Singapore, SG	207	5897

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Method and apparatus for surface profilometry

Number of patents in Portfolio can not be more than 2000

United States of America Patent

06650824

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PATENT NO	4641972
SERIAL NO	06650824
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06650824

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