Importance

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Abstract

A carrier for a flat photomask substrate having peripheral edges comprises a frame, a handle, a shaft, primary rings, and a spring. The frame has two ends, a periphery, and a shape with one side open. The handle has two ends and is journaled to one of the two ends of the frame. The shaft is provided through the one end of the frame and one end of the handle. This shaft allows the one end of the frame to pivot in a freely rotatable manner about the one end of the handle. The primary rings are arranged at the other end of the frame and at the one end of the handle. Such primary rings support the peripheral edges of the flat photomask substrate. The spring extends between the one end of the frame and the one end of the handle. This spring presses the primary rings into contact with the peripheral edges of the flat photomask substrate. The carrier also comprises auxiliary rings, recesses formed in each of the primary and auxiliary rings, grooves formed in each of the primary and auxiliary rings, a projection located where the handle is journaled to the frame, and a trigger mounted on the projection for releasing the primary rings.

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First Claim