Ellipsometric method and apparatus
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United States of America Patent
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Mar 3, 1987
Grant Date -
N/A
app pub date -
May 24, 1985
filing date -
May 24, 1984
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An ellipsometric method and apparatus for studying physical properties of a testpiece provides that during the measuring operation the angular positions of a polarizing means and an analyzing means disposed upstream and downstream of the testpiece remain fixed. Two or more discrete, mutually different predetermined states of polarization of the radiation employed are produced between the polarizing means and the testpiece and/or between the testpiece and the analyzing means, by polarization modulating elements which are disposed in the path of the radiation. In each discrete state of polarization, the intensity of the radiation which is polarized in the analyzer is measured and evaluated for determining the polarization properties of the testpiece in a computer.
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