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Abstract

A gas sensor has a plurality of sensor elements disposed on a common supporting substrate and a heating arrangement for generating the operating temperature necessary for measurement. The gas sensor unites sensor elements, which furnish desired measured quantities in different ways, on a common substrate while minimizing the heating capacity as much as possible and with a maximum possible sensitivity of response. To this end, a first group of sensors are configured as thin-film semiconductor sensors and a second group of sensor elements are disposed on a narrowed portion of the supporting substrate. Both groups of sensors are disposed on the same surface of the supporting substrate.

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First Claim