Displacement device, particularly for the photolithographic treatment of a substrate
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United States of America Patent
Stats
-
Apr 7, 1987
Issued Date -
N/A
app pub date -
Mar 11, 1986
filing date -
Nov 17, 1982
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A displacement device, particularly useful in an apparatus for the photolithographic treatment of a substrate, is provided with a holder placed on a carriage mechanism being acted upon by driving members for imparting translational and rotary movements to the holder. The carriage is constituted by a lower carriage part and an upper carriage part, each of which has a flat surface facing each other. Three linear driving members, each having a housing and a driving element projecting from both ends of the housing, and axially moving with respect to the housing, act upon the carriage. The housing of the first driving member is connected to an upper carriage part, while the driving elements of the second and third driving members are coupled to the lower carriage part with the second and third driving members respectively being connected to the first driving member in an arrangement in the shape of an H.
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