Xy-surface drive having limited .phi.-rotation and z-movement
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 7, 1987
Grant Date -
N/A
app pub date -
Nov 21, 1984
filing date -
Nov 30, 1983
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An xy-surface drive of limited .phi.-rotation and z-movement, has three box coils, positioned at mutual angles of 120.degree., the coils being mechanically connected to each other, and guided in the working air-gap of the magnet ring segment system such that when current flows through the coils, there a power or momentum results, which moves and/or rotates the coil arrangement which, by means of an electrodynamic system, is deflectably connected in z-direction to the object support only via a plate spring. The coil arrangement is connected to an incremental x-y-.phi.-measured value indicator, so that a position control connects the coils according to the deviation to the voltage sources of various polarity, so that the ideal position is attained. The z-position is optimized via an analyzer of object sharpness and a position control.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully