Apparatus and method for obtaining three dimensional surface contours
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United States of America Patent
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Apr 14, 1987
Issued Date -
N/A
app pub date -
Jul 10, 1985
filing date -
Sep 14, 1984
priority date (Note) -
Expired
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Abstract
Phase measurements of deformed grating images are used in performing improved optical profilometry. Individual line profiles are obtained at a series of rotational increments of a body. A full 360 degree surface profile, or a portion thereof, can then be generated.
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Cited Art Landscape
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