Electroless plating process and process for producing multilayer wiring board

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United States of America Patent

PATENT NO 4659587
SERIAL NO

06786056

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In a selective electroless plating process suitable for formation and correction of a minute pattern by plating film, irradiation of the surface of a workpiece with a laser beam serves to selectively activate the surface of the workpiece to allow an electroless plating film to deposited on only the activated portions. The portion of the workpiece where plating is effected is irradiated with a radiation energy beam to form a damaged portion, which is contact with a plating bath during and/or after the irradiation to selectively from a plating film on the damaged portion. The portion of a workpiece where a pole as the connector part of a multilayer wiring board is to be formed is irradiated with a laser beam and allowed to have a pole selectively formed only thereon.

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Patent Owner(s)

Patent OwnerAddress
HITACHI LTD A CORP OF JAPAN6 KANDA SURUGADAI 4-CHOME CHIYODA-KU TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hanazono, Masanobu Mito, JP 20 297
Imura, Midori Tokyo, JP 2 62
Kazui, Shinichi Hadano, JP 36 545
Miura, Youzi Hitachi, JP 1 38
Morijiri, Makoto Hitachi, JP 31 430
Ogino, Hiroyuki Hadano, JP 111 1575

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