High vacuum gate valve having improved metal vacuum seal joint

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 4681329
SERIAL NO

06881074

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A two part high vacuum gate valve construction includes a control mechanism part having a limited displacement stem passing through a first generally rectangular high vacuum flange and a valve body part including a generally rectangular case, a second generally rectangular high vacuum joint providing flange having a mirror image sealing geometry to the first high vacuum flange, two machined fluid flow flanges passing through openings defined through opposite sidewalls of said case and sealed thereto, at least one of the fluid flow flanges having an inside gate sealing surface machined prior to insertion through and sealing of the flange to the sidewall of the case; a two part, levered carriage having a central transverse pivot joint and having an endwall engagement mechanism for causing the pivot joint to pivot toward the inside gate sealing surface of the one flow flange in response to continued actuation force supplied by the control stem shaft after an inside endwall of said case has been contacted; a valve gate having a sealing surface for engaging the inside gate sealing surface of the one flow flange when the carriage means is opposite the other flow flange the gate being pivotally attached to the carriage at the central transverse pivot joint, a double jointed linkage assembly having one link part pivotally fixed to the second flange and linked to the control stem shaft for double jointed arcuate movement.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
MDC VACUUM PRODUCTS, LLCHAYWARD, CA1

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Contin, Jose L Orinda, CA 5 94

Cited Art Landscape

Patent Info (Count) # Cites Year
 
VARIAN ASSOCIATES, INC. (1)
* 4303251 Flange sealing joint with removable metal gasket 29 1980
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
Kimball Physics, Inc. (2)
* 5593123 Vacuum system components 4 1995
* 2012/0112,026 APPARATUS FOR SUPPORTING AN ASSEMBLY OF CONFLAT-CONNECTED ULTRA-HIGH VACUUM MODULES 7 2011
 
BROOKS INSTRUMENT, LLC (1)
* 5803507 Apparatus for handling process fluid 24 1995
 
FCA US LLC (1)
* 6095109 Method for improved sealing between members of fastened joint 0 1998
 
MUSASHI ENGINEERING, INC. (2)
* 9249909 Seal structure for flow-path connection part 0 2012
* 2014/0375,051 SEAL STRUCTURE FOR FLOW-PATH CONNECTION PART 0 2012
 
APPLIED MATERIALS, INC. (5)
7469715 Chamber isolation valve RF grounding 3 2005
* 2007/0000,608 Chamber isolation valve RF grounding 1 2005
* 2010/0127,201 INTERLOCKING VALVE CHAMBER AND LID 0 2008
8327878 Chamber isolation valve RF grounding 2 2008
* 2011/0058,919 MECHANICAL MODULARITY CHAMBERS 0 2009
 
MDC VACUUM PRODUCTS, LLC (2)
* 4904141 Manipulating device for high vacuum chamber 4 1987
6854708 High-vacuum valve with retractable valve plate to eliminate abrasion 10 2003
 
UCHICAGO ARGONNE, LLC (1)
* 2010/0230,960 GENDERLESS FLANGE FOR HIGH VACUUM WAVEGUIDES 0 2009
 
TOKYO ELECTRON LIMITED (1)
6719272 Valve and vacuum processing device with the valve 3 2001
 
HERMES MICROVISION, INC. (2)
* 9581245 Metal seal for ultra high vacuum system 0 2012
* 2013/0257,044 METAL SEAL FOR ULTRA HIGH VACUUM SYSTEM 0 2012
 
ETS J.C. COUREAU, A FRENCH CORP. (1)
* 5029809 Valve-control device and valve having such a control device 2 1990
* Cited By Examiner