Pressure sensitive element
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United States of America Patent
Stats
-
Jul 28, 1987
Grant Date -
N/A
app pub date -
Apr 7, 1986
filing date -
Apr 11, 1985
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A pressure sensitive element having a pair of light reflecting thin films formed through a thin film producing process and composing a Fabry-Perot resonator which is arranged so as to face a light transmitting system, and a diaphragm laminated on the light reflecting thin films, wherein an optical path difference is formed in accordance with an interval of an air gap located between the pairs of light reflecting thin films, while the interval of the air gap changes by the deformation of the diaphragm.
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