Illumination apparatus
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United States of America Patent
Stats
-
Jul 28, 1987
Issued Date -
N/A
app pub date -
Sep 30, 1986
filing date -
May 2, 1984
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An illumination apparatus for illuminating, with a light beam of arcuate cross-section, a mask having an integrated-circuit pattern to transfer the integrated-circuit pattern onto a semiconductor wafer includes an illumination optical system having a light source, a plurality of cylindircal lenses and a collimator lens to illuminate, in the Kohler illumination manner, a rectangular region on a predetermined plane, a restricting member disposed in the predetermined plane to restrict the light beam incident on the predetermined plane so that a light beam of arcuate cross-section emerges from the predetermined plane, and an optical member for forming an image of the restricting member on the mask. With this arrangement, the pattern of the mask is transferred onto the wafer without any distortion.
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