Process apparatus and method and elevator mechanism for use in connection therewith
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United States of America Patent
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-
Aug 11, 1987
Grant Date -
N/A
app pub date -
May 20, 1985
filing date -
May 20, 1985
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Methods and apparatus for transferring workpieces, such as silicon wafers, between a pair of cassettes involve simultaneously and conjointly indexing the cassettes such that the cassettes are incrementally lowered as the individual workpieces are removed from one cassette and delivered to the other cassette. Such indexing of the cassettes is achieved by a single elevator mechanism adapted to support both of the cassettes such that they are vertically and horizontally offset relative to each other.
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Cited Art Landscape
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