Apparatus for applying high frequency ultrasonic energy to cleaning and etching solutions
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United States of America Patent
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Aug 11, 1987
Grant Date -
N/A
app pub date -
Nov 6, 1986
filing date -
Nov 6, 1986
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An improved apparatus for coupling ultrasonic energy from piezoelectric transducers to a liquid medium for use in cleaning or etching processes. The apparatus includes a vibration coupling plate which may be partially immersed in the liquid medium, while the upper, nonimmersed end of the plate is configured to support a pair of piezoelectric transducers disposed at 45 degree angles with respect to the lengthwise axis of the plate. The beams of ultrasonic mechanical wave energy are therefore reflected back and forth from the side edges of the plate and dispersed over a wider angle in the liquid.
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