Position detecting device and method

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United States of America Patent

PATENT NO 4688088
SERIAL NO

06723459

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Abstract

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An improved method and device for detecting a position of a mark formed on an object, by providing plural peaks in an image density distribution, wherein the image of the object having the mark is picked up to provide an image signal which in turn is processed to provide an integrated image-density distribution of the image in a predetermined direction and wherein the position of the mark is detected on the basis of the plural peaks in the integrated image-density distribution.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHA A CORP OF JAPAN30-2 3-CHOME SHIMOMARUKO OHTA-KU TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ayata, Naoki Machida, JP 44 3038
Hamazaki, Bunei Yokohama, JP 1 102

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