Importance

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Abstract

A strain sensitive element for use in a system for converting mechanical movement of portions of the element which are movable relative to each other into electrical signals, includes a planar substrate including an N-type silicon material wherein the substrate includes grooves extending into the substrate defining an integral hinge portion between at least two relatively movable parts. At least one strain gage extends across a groove without any separate support so that the strain gage and the hinge portion are spaced apart. The strain gage is joined to two of the relatively movable parts of the substrate. At least one elongate frangible link extends across a concave pit in the substrate. The frangible link is derived from the same silicon material as the substrate. The midportion of the frangible link is spaced from the lower surface of the pit and the end portions of the frangible link are joined to the substrate. At least one resistor is provided. Conductors are provided for allowing electrical communication between the resistor, the frangible link and the strain gage which are part of an electrical circuit having a resistance which can be changed by mechanically breaking the frangible link. Also provided is contact means electrically connected to the connector means for allowing electrical communication between the strain sensitive element and outside test apparatus for measuring changes in electrical resistance in the strain gage.

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First Claim