Importance

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Abstract

A quartz pressure transducer is disclosed which includes four or five elements, three of which are diaphragms containing deposited metal electrodes on both sides thereof. Since the electrodes are all on the diaphragms, the transducer disclosed herein is highly resistant to errors caused by changes in temperature, while retaining excellent resistance to errors caused by acceleration or vibration forces. The transducer may be constructed as either an absolute pressure sensor or as a differential pressure sensor, and in the primary embodiment contains a reference capacitance which may be used by appropriate electronic circuitry to provide compensation for acceleration or vibration forces, making the output of the pressure transducer of the present invention a highly accurate, highly sensitive indication of pressure sensed.

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First Claim