Antireflection coatings for silicon solar cells

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United States of America Patent

PATENT NO 4691077
SERIAL NO

06733712

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Abstract

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An improved optical match to a subsequently-formed antireflection overcoating is achieved by providing a silicon solar cell substrate with an altered surface layer that is formed by an ion-beam process, and has a refractive index between about 3.4 and about 3.6 at 633 nm and between about 3.6 and about 3.8 at 442 nm. The surface layer is formed by adding between about 2% and about 10% methane, by volume, to the hydrogen flow in a Kaufman type broad beam ion source.

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Patent Owner(s)

Patent OwnerAddress
MOBIL SOLAR ENERGY CORPORATION A CORP OF DEWALTHAM MA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gregory, James A Sudbury, MA 7 178
Hanoka, Jack I Brookline, MA 52 2631
Vayman, Zinovy Y Brookline, MA 3 54

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