Importance

Loading Importance Indicators...

Abstract

An electrode plate for generating low temperature plasma comprising a plurality of long electrode plate members with the same form, a plurality of cooling water passages, which serve simultaneously as support members, for connecting each pair of the adjacent electrode plate members respectively along their longitudinal direction with a cooling water passage therebetween so as to arrange the adjacent electrode plate members alternately up and down in parallel with no formation of a projection, and cooling water communicating pipes provided outside the electrode plate members. By arranging a pair of the present inventive electrode plates up and down in parallel and supplying high frequency electric current thereto, low temperature plasma can be generated uniformly and effectively all over the electrode plates.

Loading the Abstract Image...

First Claim