Voltage calibration in E-beam probe using optical flooding
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United States of America Patent
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-
Sep 22, 1987
Grant Date -
N/A
app pub date -
May 31, 1985
filing date -
May 31, 1985
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Method and apparatus for calibrating equipment used for testing photodiode arrays by reference to the diode under test. The diodes are illuminated with infrared radiation and different bias voltages, developed by bombardment with an electron beam, are measured at zero current. The measured voltage values are correlated with secondary emission sensor readouts to calibrate the sensor according to the specific diode being tested. Remote light emitting diodes generate the infrared radiation which is coupled to the photodiode array via optical fiber elements.
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