Wafer processing system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Nov 10, 1987
Grant Date -
N/A
app pub date -
Apr 17, 1986
filing date -
Apr 17, 1986
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wafer processing system including wafer handling arms incorporated into vacuum isolation valves is described. A loadlock with elevator and optical sensors is used to inventory and position a cassette of wafers. The wafers in the cassette can be randomly accessed. A computer is used to control the system according to a task status table independent of time sequence.
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