Spatial light modulator and method
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United States of America Patent
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-
Dec 1, 1987
Grant Date -
N/A
app pub date -
Jul 31, 1984
filing date -
Jul 31, 1984
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Spatial light modulators with deflectable metal flaps hinged to conducting posts on a substrate are disclosed. The metal flaps and conducting post may be a single piece, and connected to addressing circuitry in the substrate. Also, plasma etching to fabricate the flaps without breakage is disclosed.
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